Search results with tag "Understandillg"

Understandillg hydrogen silsesquioxane-based dielectric ...

Understandillg hydrogen silsesquioxane-based dielectric film processing Mark J. Loboda, George A. Toskey, Dow Coming Corp., Midland, Michigan . Hydrogen silsesquioxane (HSQ) resin has demonstrated unique performance as a precursor for the formation of interlayer dielectrics (ILDs) used in manufacturing ICs with multilevel metallization schemes.

  Based, Processing, Dielectric, Hydrogen, Film, Silsesquioxane, Understandillg, Understandillg hydrogen silsesquioxane based dielectric film processing, Understandillg hydrogen silsesquioxane based dielectric, Hydrogen silsesquioxane