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Measurements of Piezoelectric Coefficient d of Lead ...

Titanate Thin Films Using a Mini Force Hammer Lead zirconate titanate (PbZr xTi 1-xO 3, or PZT) is a piezoelectric material widely used as sensors and actuators. For microactuators, PZT often appears in the form of thin films to maintain proper aspect ratios. One major challenge encountered is accurate measure-

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