Search results with tag "Specifications and prospects"

Cleaning and inspection of EUV reticles: specifications ...

1 Cleaning and inspection of EUV reticles: specifications and prospects Luigi Scaccabarozzi1, Niels A. Lammers2, Roel Moors1, Vadim Banine1 1 ASML Netherlands B.V., De Run 6501, 5504DR, Veldhoven, The Netherlands 2 Technical University Eindhoven, Eindhoven, The Netherlands Corresponding author: Luigi Scaccabarozzi ASML Netherlands B.V.,

  Specification, Inspection, Prospects, Reticle, Inspection of euv reticles, Specifications and prospects