Search results with tag "Introduction to mems"

An Introduction to MEMS (Micro-electromechanical Systems)

An Introduction to MEMS Prime Faraday Technology Watch – January 2002 1 1. Introduction This report deals with the emerging field of micro-electromechanical systems, or MEMS. MEMS is a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components.

  Introduction, System, Micro, Mems, Electromechanical, Introduction to mems, Micro electromechanical systems