切削工具用コーティング技術の進化 ～CVD法 …

1 26 CVD PVD 70% 50 CVD PVD 50 Coated cemented carbide inserts have well-balanced wear resistance and chipping resistance compared with uncoated inserts made of other materials. Consequently, the shipment of coated cemented carbide inserts is increasing with each passing year. Coated cemented carbide inserts account for over 70% of all the inserts currently in use, and this trend seems to continue for many years to come. Sumitomo Electric Industries, Ltd.

2 Started research and development on coated materials 50 years ago, and has since been working hard to advance the innovation of chemical vapor deposition and physical vapor deposition coating technologies. This paper looks back at 50 years of history of coated materials development and introduces new materials. CVD PVD CVD PVD Evolutional History of Coating Technologies for Cemented Carbide Inserts Chemical Vapor Deposition and Physical Vapor Deposition Haruyo Fukui1. 1 1 WC Co 50 2 3 2.

3 2 1 1 25 40 70 CVD Chemical Vapor Deposition PVD Physical Vapor Deposition '92'93'94'95'96'97'98'99'00'01'02'03'04' 05'06'07'08'09'10'11'12'13'14 ( / ) WC 1 2016 1 SEI 188 27 CVD PVD CVD CVD CVD 1000 C CVD CVD PVD PVD 600 C 1 CVD PVD

4 2 2 2 20 m VB KT 50 1000 m 2 A B C D Fe B D 1 SCM435 Vc=250m/min 15 m 10 3. CVD 3 1 CVD 1969 Krupp CVD TiC 1976 CVD 2 Co 10 30 m WC-Co 1994 AC2000 KTVB ABCD KT VBAA 2 A-A 1 CVD PVD CVD Chemical Vapor DepositionPVD Physical Vapor Deposition

5 TiC, TiN, TiCN, Al2O3 TiC, TiN, TiCN, TiAlN, CrN 800 1000 C400 600 C CVD (1 GPa ) (-2 GPa ) 2 50 80 5 20 5 ( ) ( ) SCM435 SNGA 120408 K10)vc=250m/min f = ap= w et 15s TiN m (c) TiN/Al203 m 15s 240s 120s 1 28 CVD PVD 3 2 CVD 1970 TiN TiCN Ti 1980 Al2O3 Ti Al2O3 AC10 AC25 4 3 Ti 1000 C HT High Temperature -CVD W C Co / Co3W3C 100 C MT Moderate Temperature -CVD TiCN Al2O3 1990 AC2000

6 2006 CVD 15 m FF AC800P 5 TiCN 2 FF 3 2 1/30 3 (b ) ( )(a) 2 TiCN (a) HT-CVD (b) MT-CVD 3 CVD 2 FF SEM FF 2 m2 m2 m2 m m/min 1 m TiC300 110 -Al2O3/TiCNMT CVD A C720) A C10) A C2000) -Al2O3/TiCN A C700G) A C820P )

7 -Al2O3/TiCNAl2O3 C 6007008009001000HT-CVD 350 -Al2O3/TiCN -AlO/TiCiCN FF 3 CVD 2016 1 SEI 188 293 3 2006 AC600M 2014 Absotech Platinum 6 AC6030M CVD 1000 C 3 CVD 2011 AC400K 2012 ACP100 ACK200 2014 ACM200 4.

8 PVD 4 1 PVD PVD 1978 Ti GA8 7 AC330 CVD 1982 P PVD 1990 PVD Z Ti TiCN PVD 2 6 4 2 PVD TiN TiCN 1990 TiAlN Ar 3 TiAlN 1994 4 1 1 TiN AlN 2000 cBN ZX 8 ACZ350 Cr Si TiAlN/AlCrN ZX 9 ACP/ACK 4 AlTiSiN

9 TiN AlN 2 nm 4 TiN/AlN TEM TiN AlN 30 CVD PVD ZX Absotech Bronze ACM AC6040M 6 5 3 2 3 4 2 4 DLC Diamond like Carbon DLC DLC 6 2002 10 2012 Brilliant Coat T1500Z 11 Brilliant Coat PVD 7 5.

10 CVD TiCN Al2O3 1050100200200300400500 V (m/min) T (min)Ti AlN/AlCrNTi-Al-N SCM435 WGC4160R( 160 mm) SEET13T3 AGSN-G fz= ap=2mm ae=150mm DRY G Pa 10020060080010001200 C TiCNTiNTiAlNZX TiN/A lN400 AlCrN/T iAlN20304050 m/min 30060 ZX Z X TiAlSiN 4 TiAlN/AlCrN V-T 5 PVD DLC 300mm WEM3032 ( 32mm) APET160504 PDFR-S ADC12 V c=300m/min f z= a p=a e=5 mm L=9m D RY 6 SCM 435 10 N 500 rpm Bri lliant C oat 1 m 7 2016 1 SEI 188 31 CVD PVD AlTiN PVD nc-MeN/Si3N4 Me Ti W V 105 GPa 12 PVD HIPIMS High