Transcription of アナログ回路のための ... - el.gunma-u.ac.jp
1 1 2015 3 2 2 1-1 1-2 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) 1-3 MOSFET 2-1 2-2 (1) (2) (3) (4) 2-3 (1) Si (2) Si (3) (4) (5) PMOS NMOS 2-4 2-5 2-6 2-7 MOSFET After Alan Hastings 105 2009 3 26 3 11221121212 xXxXXXXXxx NiiNm11 NiimNs1211.
2 ,2121 XXxx1-1 4 100 CR 5k k 42 SRk 21 SRk 21 SRk 21 SR 5k 0 1-1 5 sm3 sm6 m S S m s 20 30 m s
3 1-1 6 2 Akms2 222211 msmss ::::kAAmAs :,:,2121ssmm 1-2 7 2 CksC :,CkCACm CksC /N C N2 21212 CCCCksC 1-2-(1) 8 W/L 21 RkWsR 22m:/: RsskRWRRA RkWsR1 /N R N2 W , W N R 212121 RRRRkWsR R, W R, W W 1-2-(1) 9 2211121 RNRkWssR 22221.
4 SsssNRNRNNWRWR R1 100k R2 10k R2 2 20k R1 R2 W 2 1-2-(1) 10 Si:Si:2:2gSggSRdRdWdRk Si m 1 m W 1-2-(1) 11 )42()42( Si 2 m 4 m m 20 m 40 m m )4020()4020( 0 0)4020()4020( 1-2-(2) 12 10 10 m 10 20 m m )200100()200100( 12112212112211 ,11 LCCCCWLCCCCL / C1 C2.
5 3 1L1L2W2LC2/C1> 1-2-(2) 13 Jog C1 Branch C2 Via Via R1 R2 21 Viak1:85:Al52:Via R 1-2-(3) 14 111 <110> 4 100 NBL Shadow NBL shadow NBL oxide window 1-2-(4) 15 NBL Tank NBL / 120 NBL / 150 NBL shadow NBL Emitter Base Tank NBL / 1-2-(4)
6 16 Si Final size Drawn size Si Connected dummy Unconnected dummy 1-2-(5) 17 Si Si Si 1-2-(5) 18 1 m (1) S.
7 Hausser et. al., IEEE Trans. on Semiconductor Manufacturing, Vol. 16, #2, 2003, m (1) 1-2-(6) 19 Tank Tank Contact NBL 1-2-(7) 20 N+ sinker N+ sinker 2 3 m 1-2-(7)
8 21 P Si B Hydrogen Compensation Si P Hydrogen Compensation Ti N P Hydrogen Compensation P 1-2-(8) 22 Si 25 C 125 C 25 C 40 C Cu 1-2-(9)
9 23 /Au-Si Si 42 Cu Cu ppm/ C 24Cu 16-1842 (9) Ag Au-Si 24 100 N Si N 110 100 P Si P 100 110 111 Si 1018cm-3 Si Si Si P Si 100 110 110 100 100 100 110 111 211 Si Si 1-2-(10)
10 25 A A B B B-B A-A 1-2-(10) 26 2 :::ccccccccccccsdSSd 1-2-(10) 27 1 Interdigitation A A B A A B B A B B A 1-2-(10) A B or 28 Interdigitation AABAAAABAABABAABAABCDABCABA AABAAAABAAAABAABAAABABAABABAABAABAABCDDC BAABCCBAABBAAAAABAAAABAAAABAABAAABAAABAA AABABAABABAABABAABAABAABADAABCDBCADBCABC BACBCAABBAABAAA AABAAAABAAAABAAAABAABAABAAAABAABAAAAABAB AABABAABABAABABABAABAABAABAACDDCBAABCDDC BAABBAABCABCCBACABABBABAAAAA 1-2-(10)
