FE-17-IG-001 【標題】真空装置の排気計算について

1 1 FE-17-IG-001 ( ) ( ) 25 1. (1) ( ) [ ] [ ] (1) (5) / complete (2) (760 10 3 Torr) (10 12 Torr) ( 2 ) 10 5 Torr.

2 1 Torr 1mm(1mmHg) Torr SI (Pa m s) (Torr l cm s) ( l ) (3) / Poiseuille 2 Knudsen Knudsen ( ) ( ) 3.

3 (1) ( ) (2) (3) Re 4000 Re 2000 Re 2200 Re 1200 ( ) 1200 Re 2200 Re [UD/ ] Re {4M /( RT )}(Q/D) M ( )( ) R (gr cm/mol K) T (K) ( sec.) Q [ cm3( )/sec.] D (cm) (3) Knudsen ( /D) (PD) (cm) [ 20 C 1 Torr ] A1 3 P (Torr) D (c ) /D PD 3 (a) ------------------------- PVa ( l Torr) (b) ---------------- Qe ( l Torr/sec) (c) ------------ Qr ( l Torr/sec) (d)

4 --------------------------- Ql ( l Torr/sec) (e) / -------------------- Qb ( l Torr/sec) Va Qe / Qe Qr (Qe+Qr, Qe B1 B2-1 ) Ql ( B2-2 ) Qb B2 3 QT PVa/t Qe Ql Qb (t ) QTC Qe Qr Ql QTC Ql Qb QT QTC Unknown ( , ) QT QTC 5 5.

5 ( ) (1) C ( 4 ) Q C(Pi Po) C Q / (Pi Po) [ /sec] ---------------------------(a) Q ( l Torr/sec.) C ( /sec) 4 Pi = (Torr) Po = (Torr) / (Pi+Po)/2 A2 A1 5 Q C C [l/s] C ( ) Q [ x ] [ l Torr /s ] Q ( 4 ) (2) 20 C ( A2 C20A ) 20 C C ( C ( 4/ ))

6 C20A C (29/M) (T/293) C20A ( sec.) M ( ) T (K) (3) C (1/C1 1/C2 1/C3 1/C4 ) 1 C C1 C2 C3 C4 P / 1 5 6 7 A C ( l /sec ) C20A 20 C ( /sec) Q (l-Torr/s) P (Torr) (P1+P2)/2 P1 (Torr) P2= (Torr) ( P2/P1) M ( )(gr/mol) T (K) ( gr/cm sec.)

7 ( / ) [ (Dh /D)2 ] (-) Cc ( r rc r rc ) rc = [ {2/( +1)} / ( 1) ] a, b, ao, ai, D1, D2 (cm) D (cm) Dh (cm) L (c ) Le (cm) A [ D2/4](cm2) Ah (cm2) Dh2/4 B (c ) Y ( 1a) KR = ( 1b) KS = ( 1c) KA ( ) ( 1d) 1a ( ) a/L Y 1b ( ) a/b KR c L/b 2 3 4 5 10 10 Ks ln(3/8)(L/b) 8 1d ( ) D2/D1 0 KA 1 A2 (1) ( ) ( 1) (3) C ( D2/8)C*{(L*/ *)/(1 L* 2L*/ *)}[ / * 9 2{ /4 128L*/(27 )}] ( D2/16)C*P * 2 /D L* 2L/D (L* 3 /8) C* {(8T/ )(R/M)} P (10 8L/D)/{10 19L/D 6(L/D)}

8 2} (m) D ( ) L ( ) T= (K) C* ( 3/s) (R/M) (J/ K) ( 2) (1) C CV KCM{1 (a/ ) }/[1 {16K/(3 )} (a/ ) ] CV (cm3/ ) CM (cm3/ ) (cm) a (cm) b K ( ) /a 2 4 6 8 10 20 40 60 80 90 K ( 3) (1) C CM[{3 x/(64 )}+K{1+( + )(x/ ) }/{1+( )( + )(x/ ) }] (D1/2)(1 D2/D1)Z / [{1 (D2/D1)2}(D1/D2)2] Z 1 (D2/D1)4 {1 (D2/D1)2}2 / ln(D2/D1) CM (cm3/s) (cm) D1 (cm) D2 (cm) K ( ) sin 1(D2/D1) 0 10 20 30 40 50 60 70 80 90 K 9 6 (1) ( ) ( ) ( ) (Q ) SeP1 C(P1 P2) SpP2 1/Se 1/C 1/Sp Se CSp /(Sp C) Sp CSe /(C Se) ----(b),(c),(d),(e) Se (l/s) C (l/s) Sp (l/s)

9 P1,P2 (Torr) Se Sp C 10 Sp C Se C ( ) Sp C Se Sp (c) A2 (2) Sp P2 C Se [Sp {1 (Po/P)}So] P1 P2 P Se (P/Po 1)/{(1/So 1/C)(P/Po) (1/C)} Se (P/Po 1)/{P/(SoPo) 1/(CoPo) 1/(CoP)} C CoP Po So Co [Sp P2] P1 P2 P C P2 P1 1 1 ( 6 ) 1 2 P2 Sp P1 3 P1 P2 P C Q Q P2 P1 P2 11 )

10 C P2 Se ) ( P) P2 P2 P1,Se,C,Sp A3 P1 Se ( ) A1 JJ P2i Min (Torr) P2e Max (Torr) P (Torr) (c ) D (cm) T (K) 1 JJ P2 P2i P2 Sp Q SpP2 P1 P2 P