HPFS Fused Silica Standard Grade - Valley Design

1 Semiconductor OpticsHPFS Fused Silica Standard GradeHPFS Standard Grade , Corning code 7980, is a high purity synthetic amorphous silicon dioxide manufactured byflame hydrolysis. The noncrystalline, colorless, Silica glass combines a very low thermal expansion coefficient withexcellent optical qualities and exceptional transmittance in the ultraviolet. It is available in a number of grades fordifferent order to satisfy the challenging quality requirements of our customers in leading edge applications such asmicrolithography, Corning is dedicated to continuous improvement. Our investments in research and development,combined with Corning s quality systems, support our technology leadership position and ensure that we meet ourcustomer s requirements on time, every Grade Selection Chart HPFS Standard GradeCorning defines and certifies the quality of HPFS glass using two criteria.

2 Inclusions and homogeneity Class Homogeneity3,4 ppmGradeClass Total Inclusion1 Maximum2 AAAB C D E F G5 Cross Section [mm2]Size [mm] 1 2 3 4 5 NS0 1 2 3 4 5 NOTES:1. Defines the sum of the cross section in mm2of inclusions per 100 cm3of glass. Inclusions with a diameter mm are Refers to the diameter of the largest single Index homogeneity: the maximum index variation (relative), measured over the clear aperture of the Index homogeneity is certified using an interferometer at nm.

3 The numerical homogeneity is reported as the average through the piece thickness. Blanks with a diameter up to 450 mm can be analyzed over the full aperture. Larger parts can be analyzed using multiple overlapping apertures. The minimum thickness for index homogeneity verification is 20 mm. For thinner parts, the parent piece is NS (not specified)Mechanical and Thermal Properties:Unless otherwise stated, all values @ 25 CElastic (Young s) Modulus GPaSoftening Point 1585 C ( poises)Shear Modulus GPaAnnealing Point 1042 C (1013poises)Modulus of Rupture, abraded MPaStrain Point 893 C ( )Bulk Modulus GPaThermal Conductivity W/m KPoisson s Ratio Diffusivity cm2/sDensity g/cm3 Average ppm/K 5 C-35 CKnoop Hardness (100 g load)

4 522 ppm/K 0 C-200 ppm/K 100 C-200 CChemical Durability and ImpuritiesWeight LossSolution Time [mg/cm2] Impurities5% HCL by weight @95 C 24 h < OH content (by weight): 800-1000 ppm5% NaOH @95 C 6 h Impurities other than OH: 1000 NA2CO3@95 C 6 h H2SO4@95 C 24 h < H2O @95 C 24 h HF by weight @25 C 20 m NH4F*HF by weight @25 C 20 m TransmittanceHPFS Standard Grade is certified to meetTexternal 80%/cm@185nm (T internal 88%/cm@185nm), when measured througha polished, uncoated sample.

5 A typicalinternal transmittance curve for HPFS Standard Grade Fused Silica is shown [%/cm]0500 1000 1500 2000 2500 3000 3500 4000wavelength [nm]Refractive Index and DispersionData in 22 C in 760mm Hg dry nitrogen gasWavelength RefractiveThermalPolynomial Dispersion Equation Constants*1[air]Index *2 Coefficient [nm]n n/ T*3(ppm/K) x x x x x x x nC Dispersion Equation Constants * nF n/ TDispersion Equation Constants * x

6 X Optical -nC Coefficient nm/cm MPaStriae ISO 10110-4 Class 5/Thickness DirectionBirefringence 1nm/cm, lower specifications available*1 Polynomial Equation: n2= A0+ A1 4+ A2 2+ A3 -2+ A4 -4+A5 -6+ A6 -8+ A7 -10with in m*2 Sellmeier Equation: n2-1 = B1 2/( 2-C1) + B2 2/( 2-C2) + B3 2/( 2-C3) with in m*3 n/ TEquation (20 25 C) = C0+ C1 -2+ C2 -4+ C3 -6with in mCorning IncorporatedOne Riverfront PlazaCorning, NY 14831607 974 9000 Corning Incorporated 2003 HPFS is a registered trademark of Corning 30, 2003We are here to help you specify the best product for your application.

7 For further information,please contact: Worldwide AccessibilityUnited States/Canada Sales OfficeCorning IncorporatedSemiconductor Optics Business334 County Route 16 Canton, NY 13617t: f: : Sales OfficeCorning GmbHCorning InternationalAbraham-Lincoln-Strasse 30D-65189 Wiesbaden, Germanyt: f: : Sales OfficesCorning International 35 Kowa Building, 3F14-14, Akasaka 1-chomeMinato-Ku, Tokyo 107-0052 Japant: f: International1 Kim Seng Promenade#12-12 GreatWorld CityWest TowerSingapore 237994 Republic of Singaporet: f: Korea Company Floor, Kukje Center , Hangangro 2-KaYongsan-KuSeoul, Korea 140-702t: f: Glass Taiwan Co.

8 # 1023, 12 FNo. 205 Tun Hua North RoadTaipei, Taiwant: f: Sales OfficeCorning International AustraliaSuite 1812, Tryon RoadLindfield, NSW 2070 Australiat: f: HeadquartersCorning IncorporatedOne Riverfront PlazaCorning, New York 14831-0001t: 607-974-9000 The information contained hereinis based upon data considered to be accurate. However, no warranty is expressed or impliedregarding the performance of thisproduct. The only applicable warranties are those that are setout in a contract or purchase.