Instruction Manual - idealvac.com

1 A735-01-840 Issue BInstruction ManualnXDS Pump AccessoriesThis page has been intentionally left blank. Edwards Limited 2013. All rights reserved. Page iEdwards and the Edwards logo are trademarks of Edwards Issue BContentsSectionPage1 Introduction .. and definitions .. and operation safety .. and inspect .. of accessories .. and accessories .. 22 Gas ballast adaptor blank .. the gas ballast adaptor blank .. 53 Gas ballast adaptor .. data .. the gas ballast adaptor .. 74 Inlet/exhaust filter .. data .. the inlet/exhaust filter .. of elements .. and replacement of the element .. 115 Silencer .. data .. the nxds silencer .. of elements .. of elements .. of elements .. 166 Exhaust nozzle .. data .. the exhaust nozzle .. 177 Mountable vibration isolators .. data .. 19cg/0219/08/13A735-01-840 Issue BPage ii Edwards Limited 2013. All rights and the Edwards logo are trademarks of Edwards .. the Edwards mountable vibration isolators.

2 208 Chemical resistance conversion kit .. the chemical resistance conversion kit .. port conversion .. 239 Pump-to-controller cable .. data ..25 For return of equipment, complete the HS Forms at the end of this for nxds pumps - general view (o-ring seals not shown) .. 32 Gas ballast adaptor blank fitting .. 53 Gas ballast adaptor conversion .. 74 Inlet/exhaust dust filter components and dimensions .. 95 Silencer dimensions (mm) .. 146 Nozzle and dimensions .. 177 Vibration isolator dimensions .. 198 Inlet/exhaust port conversion .. 23 Edwards Limited 2013. All rights reserved. Page iiiEdwards and the Edwards logo are trademarks of Edwards Issue BTablesTablePage1 Gas ballast adaptor blank - checklist of components (A735-01-806) .. 52 Gas ballast adaptor technical data .. 73 Gas ballast adaptor - checklist of components (A735-01-809) .. 74 Inlet/exhaust filter technical data .. 95 Inlet/exhaust filter - checklist of components NW25 (A505-97-805)/ NW40 (A505-97-806).

3 106NW25/NW40 filter element replacement kit .. 117 Silencer technical data .. 138 Silencer - checklist of components (A505-97-000) .. 1510 Nozzle technical data .. 1711 Exhaust nozzle - checklist of components (A505-09-000) .. 1712 Vibration isolator technical data .. 1913 Mountable vibration isolators - checklist of components (A248-01-441) .. 2014 Chemical resistance conversion kit - checklist of components nXDS6i/10i/15i (A735-01-807) .. 2115 Chemical resistance conversion kit - checklist of components nXDS20i (A735-01-808) .. 2116 Ordering information .. 2517 Checklist of components .. 25 Associated publicationsPublication titlePublication numberVacuum pump and vacuum system safetyP400-40-100 This page has been intentionally left Issue BPage iv Edwards Limited 2013. All rights and the Edwards logo are trademarks of Edwards Limited. Edwards Limited 2013. All rights reserved. Page 1 Edwards and the Edwards logo are trademarks of Edwards Issue and definitionsThis Manual provides installation, operation and maintenance instructions for the Edwards range of accessories for the nxds pump accessories are shown in Figure 1.

4 The Item Numbers for the accessories are listed in the appropriate sections. The accessories must be used as specified in this Manual . Read this Manual before installing accessories onto the nxds pump. Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined are given where failure to observe the Instruction could result in damage to the equipment, associated equipment and accordance with the recommendations of EN61010, the following warning labels may appear on the pump or its accessories:WARNINGW arnings are given where failure to observe the Instruction could result in injury or death to - refer to accompanying - risk of electric - hot Issue BPage 2 Edwards Limited 2013. All rights and the Edwards logo are trademarks of Edwards and operation safetyBefore installing the accessory: Switch off the nxds pump and wait until the pump has stopped rotating. Isolate the pump controller from the electrical and inspectRemove all packing materials and check the accessory.

5 If it is damaged, notify the supplier and the carrier in writing within three working days; state the item number of the accessory together with the order number and the suppliers invoice number. Retain all packing materials for inspection. Do not use the accessory if it is that the packaging contains the items shown in the Checklist of items table. If any of the items are missing, notify the supplier in writing within three working days. of accessoriesDispose of the used accessories and accessory spares safely in accordance with all local and national safety environmental and accessoriesEdwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France, Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, , and a worldwide network of distributors. The majority of these centres employ service Engineers who have undergone comprehensive Edwards training spare parts and accessories from the nearest Edwards company or distributor.

6 When ordering, please state for each part required: Model and Item Number of the equipment Serial number (if any) Item Number and description of the procedures described in this Manual to install the accessory. Obey all safety instructions and take note of all appropriate precautions. If not, damage to the accessory or other equipment and injury to people can user of the nxds pump system is responsible for the safe operation and monitoring of the installing the accessory, ensure the pump is off and the controller is isolated as described below. Edwards Limited 2013. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Issue BFigure 1 - Accessories for nxds pumps - general view (o-ring seals not shown)1. Gas ballast adaptor blank2. Gas ballast adaptor3a+b. Inlet/exhaust filter4. Silencer5. Exhaust nozzle6. Vibration isolators7. Chemical resistance conversion kit8. Pump-to-controller cable (not shown)A735-01-840 Issue BPage 4 Edwards Limited 2013.

7 All rights and the Edwards logo are trademarks of Edwards page has been intentionally left blank. Edwards Limited 2013. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards ballast adaptor blankA735-01-840 Issue B2 Gas ballast adaptor gas ballast adaptor blank (Figure 1, item 1) allows conversion from a standard nxds pump into an nxds -R pump. The gas ballast control is replaced with a blank adaptor to prevent accidental air admittance into the pump. This feature is also useful for applications such as rare gas recirculation or gas the gas ballast adaptor blankThe method for installing the gas ballast adaptor blank follows some of the stages used to install the gas ballast adaptor. To install the gas ballast adaptor blank, refer to stages 1, 2, 3, 4 and 6 of the gas ballast adaptor fitting instructions in Section For the instructions on how to fit the adaptor blank refer to the Instruction and Figure 2 a pin spanner (not provided), fit the adaptor blank and tighten to 6 2 - Gas ballast adaptor blank fittingNote:As a precaution, Edwards recommends that a complete vacuum leak check be performed following this 1 - Gas ballast adaptor blank - checklist of components (A735-01-806)QtyDescriptionCheck ( )1 Gas ballast adaptor blank 1O-ring X A735-01-840 Issue BPage 6 Edwards Limited 2013.

8 All rights and the Edwards logo are trademarks of Edwards page has been intentionally left blank. Edwards Limited 2013. All rights reserved. Page 7 Edwards and the Edwards logo are trademarks of Edwards ballast adaptorA735-01-840 Issue B3 Gas ballast gas ballast adaptor (Figure 1, item 2) fits in place of the gas ballast control. The gas ballast adaptor allows connection of a controlled supply of inert gas such as nitrogen into the low vacuum stage of the gas purge can be used to dilute flammable gases down to a safe level (Edwards recommends 1/4 of the Lower Explosive Limit). An inert purge can also be used to reduce the likelihood of gas vapours such as iodine from condensing at the outlet stage of the the gas ballast adaptorFigure 3 - Gas ballast adaptor conversionTable 2 - Gas ballast adaptor technical dataMaximum permitted gas ballast inlet bar gaugeOrifice diameter mmMaximum slmTable 3 - Gas ballast adaptor - checklist of components (A735-01-809)QtyDescriptionCheck ( )1 Gas ballast adaptor 1O-ring ID x A735-01-840 Issue BPage 8 Edwards Limited 2013.

9 All rights and the Edwards logo are trademarks of Edwards ballast adaptorEnsure the pump is switched off before a precaution, Edwards recommends that a complete a vacuum leak check be performed after this : Ensure the cooling fan operates correctly following the installation of the gas ballast adaptor. Retain the gas ballast control assembly and seat for future use if Undo the 2 off retaining bolts and partially remove the fan : Cooling fan supply lead Carefully disconnect the cooling fan electrical supply lead and remove the fan Using a 21 mm AF spanner, remove the gas ballast control Carefully remove the gas ballast control seat and Assemble the gas ballast adaptor and new O-ring, ensure the O-ring and seal surface are clean and free of dust or Reconnect and assemble the cooling fan supply lead and fan cowl (1) in reverse order. Torque the retaining bolts (2) to 3Nm. Edwards Limited 2013. All rights reserved. Page 9 Edwards and the Edwards logo are trademarks of Edwards filterA735-01-840 Issue B4 Inlet/exhaust filter is not designed to withstand positive pressures.

10 Ensure that any system valves are correctly scheduled to avoid pumping to a closed exhaust line. Refer to the Installation section of the nxds pump Instruction inlet/exhaust filter performs a number of functions. It can be connected in-line between the nxds pump exhaust and the exhaust extraction system (Figure 1, item 3a), this is especially useful for process applications such as gas recirculation. Alternatively, it can be connected in-line between the nxds pump inlet and the chamber outlet connection (Figure 1, item 3b) to prevent particles from migrating (backstreaming) into the system, or to stop particulate from entering the pump. The filter is supplied ready to use with a 5 micron element. A 1 micron element can be purchased separately and used to replace the 5 micron element if dataFigure 4 - Inlet/exhaust dust filter components and dimensionsTable 4 - Inlet/exhaust filter technical dataInlet/outlet port sizeNW25 (A505-97-805)NW40 (A505-97-806)Leak tightness1 x 10-5 Inlet1.