JEITA半導体部会 シリコン規格管理小委員会の終息 …

1 jeita 2016 3 28 3 2016 jeita EM-3501 (1) 1.. 1 2.. 1 3.. 1 .. 1 .. 2 .. 3 4.. 3 .. 3 .. 4 .. 4 .. 4 5.. 5 .. 6 .. 7 .. 10 .. 10 .. 14 jeita EM-3501 (3) 14 jeita EM-3501 1 Standard methods for determining the orientation of a semiconductor silicon single crystal 1.

2 2. 15 30 3. (((( )))) Bragg ( ) Bragg Bragg 2d sin = n d Bragg d sin 2d sin jeita EM-3501 2 Bragg Bragg Cu K Bragg Bragg (111) (111) 14 14 100 (110) (220) 23 40 65 (311) (311) 28 05 32 (100) (400) 34 36 31 (331) (331) 38 13 18 (211) (422)

3 44 04 18 Ni Ni (a) (b) Geiger Muller jeita EM-3501 3 (a) Bragg (b) Bragg (c) (b) 180 1 2 (d) 90 (c) (b) (e) tan tan tan 4.

4 jeita EM-3501 4 mm 25 50 15 30 80 10 C 10 (a) (b) (c) ' ' jeita EM-3501 5 (d) ' (e) (c) ' 180 (f) 5.

5 jeita EM-3501 6 jeita EM-3501 7 I II III IV V (1) (2) (3) 0 jeita EM-3501 8 (=toward nearest < > direction in a plane parallel to a primary flat) 2 ( ) (=toward nearest < > direction in a plane parallel to a primary flat) ( )

6 jeita EM-3501 9 10 10 ( ) 11 ( jeita EM-3501 10 (1) (2) (3) 0 32 3 21 3 04 (4) 3 20 0 15 2 50 1 10 (5))

7 15 1 20 12 13 jeita EM-3501 13 { } ( jeita EM-3501 14 1. -18 -18 2.)

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9 (c) ' 5. jeita EM-3501 16 { 6. -3501 2002 ( ) ( ) ( ) ( ) ( ) ( ) ( ) jeita EM-3501 17 ( )}

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