参考資料 Ⅸ JIS規格対応 - chiyoda-seiki.co.jp

1 JIS .. JIS . JIS .. JIS JIS .. W22 14/ Ar, N2, O2, Xe, Air W22 14 . Ne . Ar W22 14 CO2, Kr, Xe, Ne, CF4.. W22. AsH3 W22 14 .. BF3 W22 14 13.. 21 14/ He Cl2 W26 14 .. F2 W22 14 .. W21. HCl W26 14 .. H2 W22 14 14.. W22 14/ H2, CO, CH4, C2H6, H 2S W22 14 . C2H4, SiH4.. He 21 14 .. W22.. Kr W26 14 . 14. NH3 W22 14 . W23 14/ O . 2 .. NO W22 14 .. N2 W22 14 .. W23. W27P=2 . N2O 16. W22 14 . Ne W22 14 .. W23 14 14/ LPG. O2 . W22 14 .. PH3 W22 14 .. SF6 W22 14 . 16.. SiH4 W22 14 .. SO2 W22 14 W26 14/ . Cl2, HCl, Kr, CCl2F2, CHCIF2.. Xe W22 14 .. CCl2F2 12 W26 14 . W26.. CHClF2 22 W26 14 . CH4 W22 14 . 12. W27P=2 N2O .. CO W22 14 .. CO2 W22 14 . W27.. C2H2 . C2H4 W22 14 16.. C2H2. C2H4O W22 14 .. C2H6 W22 14 .. C3H6 W22 14 . 10. 21. 5.. C3H8 14 .. C4H10 W22 14 . 301. CGA/ BS .. CGA/ BS . RH= EXT= . CGA , BS LH= INT= .. CGA CGA .. CGA 346 CONNECTION 320 .825"-14 RH EXT 5/8 . Air .. CGA 580. Ar . CGA 350 . AsH3 .. CGA 330 CONNECTION 330 .825"-14 LH EXT 5/8.

2 BF3 .. CGA 660 . Cl2 .. CGA 670. F2 .. CGA 330 CONNECTION 346 .825"-14 RH EXT 5/8 HCl .. CGA 350 . H2 ..825" .830".. CGA 330 13/16" 13/16" . H2S .. CGA 580 . He CONNECTION 350 .825"-14 LH EXT 5/8 .. CGA 580. Kr . CGA 660. NH3 . CGA 660 . NO CONNECTION 510 .885"-14 LH INT 5/8 .. CGA 580 . N2 .. CGA 326 . N2O . Ne . CGA 580 . CONNECTION 540 .903"-14 RH EXT . CGA 540 . O2 .. CGA 350 . PH3 .. CGA 590. SF6 . CONNECTION 580 .965"-14 RH INT . CGA 350. SiH4 .. CGA 660 . SO2 . BS.. CGA 580 . Xe . CONNECTION 660 "-14 RH EXT 1/2 . CGA 660 . CCl2F2 12 .. CGA 660 . CHClF2 22. CH4 . CGA 350 .. CONNECTION 670 "-14 LH EXT 1/2 CGA 350 . CO .. CGA 320 . CO2 .. CGA 510 . C2H2 . CONNECTION 678 "-14 LH EXT 11/16-20 C2H4 . CGA 350 .. CGA 510 . C2H4O .. CGA 350 . C2H6 .. CGA 510 CONNECTION 326 .825"-14 RH EXT 3/8 C3H6 . CGA 510.. C3H8 .. CGA 510 . C4H10 . 302. CGA-DISS .. CGA DISS . RH= EXT= . CGA DISS LH= INT= . CGA. CONNECTION CGA DISS CONNECTION No.. No. AsH3 . No.

3 632 No. 716 GeH4 . SiH4 . B2H6 A BB CC NN MM A A BB CC NN MM A. 632. H2Se . CH3 3 SiH VALVE OUTLET NIPPLE VALVE OUTLET NIPPLE. Si2H6 DIA BB .649 - .653 ( - ) DIA BB .677 - .681 ( - ). PH3 DIA CC .796 - .800 ( - ) DIA CC .855 - .859 ( - ). BCl3 . DIA MM .646 - .642 ( - ) DIA MM .674 - .670 ( - ). HBr 634. DIA NN .793 - .789 ( - ) DIA NN .852 - .848 ( - ). HCl . SiH2Cl2 No. 634 No. 718 SiCl4 636. SiHCl3 . A BB CC NN MM A A BB CC NN MM A. HF . WF6 . 638. VALVE OUTLET NIPPLE VALVE OUTLET NIPPLE. NF3 640. AsF5 . DIA BB .663 - .667 ( - ) DIA BB .691 - .695 ( - ). PF5 DIA CC .782 - .786 ( - ) DIA CC .841 - .845 ( - ). BF3 642 DIA MM .660 - .656 ( - ) DIA MM .688 - .684 ( - ). SiF4 DIA NN .779 - .775 ( - ) DIA NN .838 - .834 ( - ). GeF4 . No. 636 No. 720 N2O 712. O2 714. CO2 A BB CC NN MM A A BB CC NN MM A. C5F8 ZLF-58. C2HF5 125 VALVE OUTLET NIPPLE VALVE OUTLET NIPPLE. CF3CF=CFCF3 2 . C4F8 C318 DIA BB .677 - .681 ( - ) DIA BB .705 - .709 ( - ). SF6 DIA CC.

4 768 - .772 ( - ) DIA CC .827 - .831 ( - ). CCl3F 11 DIA MM .674 - .670 ( - ) DIA MM .702 - .698 ( - ).. CCl2F2 12 716 DIA NN .765 - .761 ( - ) DIA NN .824 - .820 ( - ). CClF3 13 No. 638 No. 722 CF4 14. CHF3 23.. C2 ClF5 115 A BB CC NN MM A A BB CC NN MM A. C2F6 116. C3F8 218 VALVE OUTLET NIPPLE VALVE OUTLET NIPPLE. C2H2F4 134a DIA BB .691 - .695 ( - ) DIA BB .719 - .723 ( - ). Ar . DIA CC .754 - .758 ( - ) DIA CC .813 - .817 ( - ). Kr . N2 DIA MM .688 - .684 ( - ) DIA MM .716 - .712 ( - ). 718 DIA NN .751 - .747 ( - ) DIA NN .810 - .806 ( - ). He . Ne . No. 640 No. 724 Xe . NH3 720. H2S 722 A BB CC NN MM A A BB CC NN MM A. CO . C2H4 VALVE OUTLET NIPPLE VALVE OUTLET NIPPLE.. CH3F 41 DIA BB .705 - .709 ( - ) DIA BB .733 - .737 ( - ). D2 . DIA CC .740 - .744 ( - ) DIA CC .799 - .803 ( - ). H2 724. DIA MM .702 - .698 ( - ) DIA MM .730 - .726 ( - ). CH2F2 32. DIA NN .737 - .733 ( - ) DIA NN .796 - .792 ( - ). C2H6 . CH4 No. 642 No. 726 C4F6 2316. C2H5 2Te.

5 A BB CC NN MM A A BB CC NN MM A. CH3 2Zn . 726. C2H5 2Zn . VALVE OUTLET NIPPLE VALVE OUTLET NIPPLE. C2H5 3Al . Cl2 DIA BB .719 - .723 ( - ) DIA BB .747 - .751 ( - ). F2 728 DIA CC .719 - .723 ( - ) DIA CC .785 - .789 ( - ). NO DIA MM .716 - .712 ( - ) DIA MM .744 - .740 ( - ). DIA NN .716 - .712 ( - ) DIA NN .782 - .778 ( - ).. No. 632 No. 642 No. 712 No. 728 .. A BB CC NN MM A A BB CC NN MM A.. VALVE OUTLET NIPPLE VALVE OUTLET NIPPLE. DIA BB .649 - .653 ( - ) DIA BB .761 - .765 ( - ).. DIA CC .883 - .887 ( - ) DIA CC .761 - .765 ( - ). DIA MM .646 - .642 ( - ) DIA MM .758 - .754 ( - ). DIA NN .880 - .876 ( - ) DIA NN .758 - .754 ( - ).. No. 712 No. 728 No. 714 .. A BB CC NN MM A. VALVE OUTLET NIPPLE. DIA BB .663 - .667 ( - ). DIA CC .869 - .873 ( - ). DIA MM .660 - .656 ( - ).. DIA NN .866 - .862 ( - ). 303. DIN/ NF .. DIN / NF . RH= RFH= . DIN477 , NF-E29-650 LH= LFH= .. DIN . DIN 477 NF-E29-650 .. Outlet No.. NF . Type No. Outlet No. 1 1/14-LH Type No.

6 A Yoke .. 1/14. DIN No. 13 . Air NF-B. DIN No. 6. Ar NF-C .. AsH3 Outlet No. 2 1/14-LH . NF-E . 1/14. DIN No. 8 . BF3 NF-P .. DIN No. 8 . Cl2 NF-J . DIN No. 8 Outlet No. 3 Yoke Type No. B W30 F2 NF-P . DIN No. 8. Hcl NF-K.. W30 . DIN No. 1 . H2 NF-E .. DIN No. 5 Outlet No. Yoke . H2S NF-E .. DIN No. 6 Type No. C . He NF-C . DIN No. 6 . Kr . NF-C. DIN No. 6 Outlet No. 5 1-LH. NH3 NF-C. NO . DIN No. 8 . 1-LH. NF-P . DIN No. 10 Type No. E . N2 NF-C . Outlet No. 6 1/14-RH . DIN No. 11**1 . N2O . NF-G. 1/14.. DIN No. 6. Ne NF-C. O2 . DIN No. 9 . NF-F . DIN No. 1 Outlet No. 7 G 5/8-RH.. PH3 NF-E. Type No. F . DIN No. 6 . G5/8. SF6 .. NF-C .. DIN No. 1. SiH4 NF-E. Outlet No. 8 1-RH. SO2 . DIN No. 7 . NF-K.. DIN No. 6. 1-RH.. Xe NF-C Type No. G W26 .. DIN No. 6 . CCl2F2 12 NF-C . Outlet No. 9 G 3/4-RH. W26 DIN No. 6 . CHClF2 22 NF-C.. G3/4. DIN No. 1 . CH4 NF-E.. DIN No. 5 . CO NF-E Type No. J Outlet No. 10 1/14-RH. DIN No. 6 . 1/14. CO2 NF-C. DIN No. 3.

7 C2H2 NF-A.. DIN No. 1 . C2H4 NF-E Outlet No. 11 G 3/8-RH .. DIN No. 1 . C2H4O NF-E Type No. K W27 2-RH . G3/8. DIN No. 1. C2H6 NF-E . W27 2. DIN No. 1. C3H6 NF-E Outlet No. 12 G 3/4-RFH .. DIN No. 1**2 . C3H8 NF-E . G3/4.. DIN No. 1**2 . C4H10 NF-E Type No. P W27 2-RH . Outlet No. 13 G 5/8-RFH. **1 N 2O Outlet . W27 2. G3/4 RFH .. G3/8. **2 33R DIN4661 .. Part 1 . Outlet 1/14 LH .. 304. JIS B8246 .. JIS B8246 . CGA .. No. CONNECTION.. No.. 1 O2 2-5 870 .. /.. 2 O2+CO2 2-6 880.. 7% .. /.. 3 O2+He 2-4 890.. 80% .. 4 C2H4 1-3 900.. 5 N2O 3-5 910.. 6 C3H6 3-6 920.. 305. JIS B8246 .. JIS B8246 . CGA .. No. CONNECTION .. No.. He . 7 4-6 930 . He+O2 / .. 20% .. CO2 .. 8 1-6 940 . / . CO2+O2 .. 7% .. 9 AIR 1-5 950 .. 10 N2 1-4 960 .. / .. 11 N2O 10 965 .. 30% .. 50% .. C1 2 C2 1 .. D1 D. D1 D.. R R .. L.. L.. 306.