Transcription of 진공기술의 현재와 미래 - kvs.or.kr
1 , (vacuum pumping technology) 70 . , , , . - .20 . (vacuum tube) . 1950 1960 . , 21 10.
2 , ( ) 60 . 3 2 ..Key applications driving process technology70 . Solid State Technology, 2009 10 . Key applications driving process technology Current vacuum technology Future pumping technology Conclusion Current and future trends in vacuum process technologyStephen Ormrod and Nigel Schofield Vacuum Square< >Stephen Ormrod holds a PhD in electronic engineering from the U.
3 Of Nottingham, UK, and is chief technology officer at Edwards, Manor Royal, Crawley, West Sussex, RH10 9LW United Kingdom; Schofield holds a mechanical engineering degree from Imperial College, London, and is a core technology manager at Edwards. Vacuum Magazine 2014 03 March34 . , , .. (throughput) fab .. , , (ALD : Atomic Layer Deposition).
4 , , TFT-LCD TV . Gen 10 1 2 40 . 3 4 .( 1 ) . (power source).
5 , chamber SiH4 (H2) .. (throughput) . 10 ..Current vacuum technology20 1 (oil-sealed rotary vane mechanism) . 20 . (aggressive chemicals).
6 (running clearance) (multiple stage) . , . Roots, Claw, Screw Scroll- .. [Fig. 1] A 2 million L/min pump set for a typical Gen-10 flat-panel Square . , scroll pump . (blades).
7 (acid) ..[Fig. 2] Three snapshots in time. 1 regenerative pump . (non-displacement pumping mechanism) , regenerative pump .Future pumping technology . , , .. , 3,000 3,600rpm.
8 ( ) claw, screw Roots 6,000rpm .. (stage) .. , .( 3). , . (conductance) .. scroll . scroll 1500rpm . Roots.
9 [Fig. 3] Shaft speeds for primary pumping screw ( ) 15,000rpm . , , . 10 Vacuum Square Vacuum Magazine 2014 03 March36 1 , Roots screw . blade speed .. (H2) .. (volume ratio) . ( ) 4.
10 , (work) .. , 300mbar .. non-return valve . non-return valve . (multiple stage) - - . 3 : 1 . (overload).
