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Lecture 5 Ion Implantation Reading: Chapter 5

Thick or dense materials can be used to “protect” regions from being implanted. The choice of materials ... the crystal from an amorphous layer via a process known as solid phase epitaxy (activation energy ~2.3 eV in Silicon) than it is to anneal out defects. Thus, two schemes for implants are used:

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  Phases, Dense

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Transcription of Lecture 5 Ion Implantation Reading: Chapter 5

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