MEMS技術の現状と応用動向 - Wakayama University

1 MEMS .. Institute of industrial Science University of Tokyo .. Institute of industrial Science University of Tokyo MEMS . 1980 1990 2000. sensor researchers micro sensors electrical engineers MEMS devices mechanical engineers micromachine optical engineers optical MEMS. chemists, biologists bio/chemical MEMS. communication RF MEMS. engineers Power MEMS.. Institute of industrial Science University of Tokyo .. 10nm 100 m .. Institute of industrial Science University of Tokyo . (1987 - 1994). TRANSUDUCERS-87 . (AT&T '88).. (UCB '88).. Institute of industrial Science University of Tokyo .. Institute of industrial Science University of Tokyo . Institute of industrial Science University of Tokyo . Wu, et al. Sensors & Actuators, A50, 127 (1995).. 400 .. Institute of industrial Science University of Tokyo . Institute of industrial Science University of Tokyo (1995 - ).

2 Institute of industrial Science University of Tokyo .. MEMS .. Institute of industrial Science . University of Tokyo .. Institute of industrial Science University of Tokyo .. Institute of industrial Science University of Tokyo . Digital Light Processing Texas Instrument . RAM . Institute of industrial Science University of Tokyo MEMS .. Institute of industrial Science . University of Tokyo MEMS .. Institute of industrial Science University of Tokyo MEMS . MEMS . 2002 2010 . / 1,492 3,616. VTR/ / . / . 911 1,242. SPM 33 191. 83 384. 8 28. / 122 371.. TAS 141 486. 0 371. 0 13. 1,351 2,467. 0 455. 120 3,870. ITS 0 45. 0 13. Institute of industrial Science 4,261 13,553. University of Tokyo .. MEMS .. Institute of industrial Science University of Tokyo .. MEMS.. MEMS .. MEMS .. Institute of industrial Science . University of Tokyo MEMS .. ).

3 Institute of industrial Science University of Tokyo MEMS .. MEMS .. Institute of industrial Science University of Tokyo MEMS . ( x ). ( x ).. Institute of industrial Science University of Tokyo MEMS : . 1/27 . VOA-650 20 MEMS VOA 7 . 50X25X12mm MEMS.. Institute of industrial Science University of Tokyo . santec MOVA-1 JDSU Lightconnect MATW1 ODA2601 FOVA4000.. YAG YAG . DC 5V max. DC 5V max. AC 8V max. >30dB 20dB max. 30dB. (Tuning speed . slow 20ms). <10 W 150 mW < 10 W. ( . 30dB max. (offset to>450dB). Institute of industrial Science University of Tokyo . 2 .. N2 N x N . N 32 .. ( ). N x N 2N . N 100 . Institute of industrial Science University of Tokyo .. Institute of industrial Science University of Tokyo . (100) . (100) . 100 . (100) (111).. (100).. V- (100).. 100 . Institute of industrial Science University of Tokyo . Permally piece( mm3) attached to cantilever ( mm3) w/ mirror Switch was magnetically driven and had self- latching function.)

4 Resonant frequency: 67 Hz Insertion loss: dB w/ single-mode collimated beam fiber Rise time: ms, Fall time: 2 ms 20 million cycle operation was confirmed Institute of industrial Science University of Tokyo .. Institute of industrial Science University of Tokyo .. Institute of industrial Science University of Tokyo MEMS . MEMS . MEMS .. MEMS .. Institute of industrial Science University of Tokyo .. Institute of industrial Science . University of Tokyo IV . (R 40nm). Current [ ]. (R 20nm). (R 100nm). 0 50 100 150 200 250. Voltage [V]. Institute of industrial Science University of Tokyo DNA . Nano gripper DNA molecules in water . Captured DNA molecules Institute of industrial Science University of Tokyo .. Institute of industrial Science University of Tokyo .. cm Institute of industrial Science University of Tokyo MEMS.. ( ) ( ) ( ).. MEMS.

5 Institute of industrial Science University of Tokyo . MEMS .. Institute of industrial Science University of Tokyo . MEMS .. ( ).. ). Institute of industrial Science University of Tokyo .. PLL. Structure Structure Kinesin Slide glass Microtubule .. Institute of industrial Science University of Tokyo .. ( ). ( ). IEEE J. MEMS, 2004. Institute of industrial Science University of Tokyo . MEMS .. ) .. Institute of industrial Science University of Tokyo .. (CNRS).. Institute of industrial Science University of Tokyo