No. 管理 品名 メーカー 型式 ... - askindex.co.jp

1 No. No 1F70842 ( )Vacuum anneal SHB 10610 5VC 1997500 W1000 D1300 H1590 200/220V 50/60Hz 6KW 650,000 2EE94B5 ( )Vacuum anneal DAIA VACUUM2007 :800x800x800mm :3 200V : 50Pa + 1,200,000 3 VCA414 Ion sputter EIKOIB 51987 :0 1400V DC( ) :10mA( ) Torr :130mm x 110mmH 150,000 4F50413 Ion sputter JEOLJEC 530 10 Pa 6mm 15mm 180A 6V 57mm 120 120mm 150,000 5VF3JA4 Ion sputter JEOLJFC 1500 :AC100V 50/60Hz 200,000 6F42685 Ion sputter HITACHIE 1020 ( 88mm) Au Pd(6:4) Au Pt Pd(8:2) Pt 80mm 15mm 350,000 7 VEA2A0 Ion sputter HITACHIE 10452011 DC40mA : 60xH20mm :1 30nm 350,000 8G20182 Ion slicer JEOLEM 09100 IS 650,000 9F70591 Ion beam sputter ERIONICSEIS 220 : 3 : 4 ( 20mm) :1.

2 2 3,500,000 10F90032 Ion milling HITACHIIMR 3 11992 860kg 200kg 250kg 2,200,000 11F31346 Etcher ANELVADEA 506 O/HRF PRF 153B 50/60HZ 2,500,000 12G20184 Etcher SAMCORIE 10NG2010 SF6 CHF3 O2 160 170mmRF Max500w 2,500,000 13F42708 (ECR)Etcher ANELVAL 310R E1999 100mm( ) 80mm/min 80mm 5%(Sio2 ) 2,500,000 14F42631 Sputter ANELVAL 332S FHL2001 260 ( 150 ) 50 4 ( , , ) 3,500,000 15F42678 Sputter ANELVASPF 312W1990 : 75 x1 (sio2) : 105 2,000,000 16F60482 ( )Sputter ANELVASPF 530H DP RF 3KW 1 2,200,000 17XF39A4 ( )High rate sputter ULVACSV 2002000Ni : :MAX 200mm :3 200V 50Hz 1,000,000 18F42710 Sputter ANELVAC 31031996 5,000,000 19G50081 Sputter ANELVAL 501S FHL2004 5,500,000 20F70589 Sputter ULVACSV 350 :1 : :DC :Ar :RP(D650DK)+CRYO(C15R) 1,800,000 No.

3 No 21G20201 ( )Sputter 2015W800 D1120 H1555 :Cr :Ar 2015 4 3,000,000 22F30394 Diaphragm vacuum pump ULVACDA 121D :120/145L/min :AC100V 50/60Hz 35,000 23VF39A5 High vacuum drying chamber ULVAC :ULVAC D 330 DKTMP: TMP280 400,000 24F42661 Coater ANELVAEVC 1501 2000 /min : SUS304 550xH680 150 3,000,000 25VB7853 Coater ULVACEBV 6DA1991 1,000,000 26F31220 Coater ULVACEBX 8C1982 3,300,000 27VA3D02 Coater SHINCRONBMC 800W1998 :W800 H1100 W4800 D3800 : +MBP+RP :EB3kw 3,000,000 28F60159 Coater SINCRONBMC 1350DS2005 1350 (SUS304 ) 16KW 2 15,000,000 29F42676 Coater SHIBAURABHCU 12P 75A2008 3,000,000 30F42662 Coater SHIBAURATES 12752009 2,000,000 31G10156 Coater SHOWASGC 22SA1990 2,200,000 32F31292 Coater SHOWASGC 22 SAC1998 850 H1310 10Kw 3,000,000 33F30863 Vacuum press :ULVAC VD401 : 180mm :400x430x300mm :1000x880x1640mm 300,000 34NE73A9 ( )Defoaming MUSASHIAW 20 AC100V 0.

4 5 1 0 min 1 2 0 m l 35,000 35 VCCL56 ( )Vacuum defoaming GINSENGSC150 VBP HS 2007 38 KHZ 150,000 36V94U02 Diaphragm vacuum pump ULVACDA 121D 120/145 /min(50/60Hz) 10 3 100V 50/60Hz 1400/1630rpm(50/60Hz) 35,000 37G60024 Diaphragm vacuum pump ULVACDA 240S :240/260L/min :130 Torr :AC100V 50/60Hz 50,000 38G60025 Diaphragm vacuum pump ULVACDA 240S :240/260L/min :130 Torr :AC100V 50/60Hz 50,000 39 VDC550 Diaphragm vacuum pump ULVACDA 241S :240L/min(at50Hz) :16x103Pa :1 100V 50/60Hz (at50Hz) 60,000 40VE66A7 Diaphragm vacuum pump ULVACDA 30D :30/36L/min(at50/60Hz) :1 200V 50/60Hz 15,000 No.

5 No 41VE5UC2 Diaphragm vacuum pump ULVACDA 30D :30/36L/min(at50/60Hz) :1 200V 50/60Hz 10,000 42VE5UC5 Diaphragm vacuum pump ULVACDA 30D :30/36L/min(at50/60Hz) :1 200V 50/60Hz 10,000 43VE91A9 Diaphragm vacuum pump ULVACDA 60S :60/72L/min :AC100V 50/60Hz 15,000 44V92546 Diaphragm vacuum pump ULVACDA 60S 60/72 /min(50/60Hz) 10 3Pa 7 40 100V 50/60Hz 15,000 45V92550 Diaphragm vacuum pump ULVACDA 60S 60/72 /min(50/60Hz) 10 3Pa 7 40 100V 50/60Hz 15,000 46F42670 Dry pump LEYBOLDDRYVAC Champion 5000 Special2012 3800m3/h 5X10 4mbar 380 480V 50/60HZ 25 KVA WH 100HZ DV 120HZ 1200Kg W675 D1435 H1110 500,000 47F42668 Dry pump LEYBOLDDRYVAC Champion 5000 Special2012 3800m3/h 5X10 4mbar 380 480V 50/60HZ 25 KVA WH 100HZ DV 120HZ 1200Kg W675 D1435 H1110 500,000 48F42665 Dry pump LEYBOLDDRYVAC DV 650C i 2012 650m3/h 5X10 3mbar 380 400V 50/60HZ 17 KVA 750Kg W675 D1435 H690 300.

6 000 49F42664 Dry pump LEYBOLDDRYVACDV 650C i2012 650m3/h 5X10 3mbar 380 400V 50/60HZ 17 KVA 750Kg W675 D1435 H690 300,000 50F70839 Vacuum pump ULVACDTC 41W320 D135 H215 AC100V 50/60Hz 40 46L/min 30,000 51F70840 Vacuum pump ULVACDTC 41W320 D135 H215 AC100V 50/60Hz 40 46L/min 30,000 52G40278 Vacuum pump ULVACGLD 201A20113 AC200V 50/60Hz W170 D514 H240 60,000 53G40280 Vacuum pump ULVACGLD 201A20033 AC200V 50/60Hz W170 D514 H240 60,000 54F90129 cooling system for vacuum SHINMEIWARCT 501/S 200V 50/60Hz HCFC 350kg W850 D685 H1690 600,000 55F90130 cooling system for vacuum SHINMEIWARCT752S2004 200V 50/60Hz HFC 450kg W1265 D695 H1690 700,000 56F70767 Leak detector VARIANVSPD030 :5x10 12atm cc/sec :AC100V 240V 50/60Hz 650,000 57F41137 Leak detector VEECOMS 50 x2 + TMP :1 230V 50Hz 120,000 58F42356 TABLE TOP TTIAITT A3 1 2020 10B SPW330 D420 H520 180,000 59F50317 TABLE TOP TTIALTT A3 I 2020 10B SP W120 D120 XYZ 200 200 100mm 250,000 60XC1Q52UV UV Exposure HITECHSF 3001994 99 59 F300 2 360 500,000 No.

7 No 61F30353UV UV Exposure TOSHIBATOSCURE752 : SH1002MA (s/n048119) :230x330x530mm 200,000 62F42445UV UV Exposure FUSOWF 1501C A W450 D970 H630 W430 D405 H340 200,000 63F60250UV UV Exposure W660 D1775 H1880 W500 L1655 200,000 64F60251UV UV Exposure W660 D1805 H1825 W500 L1645 200,000 65F41944UV ( )UV Exposure ConveyorGS YUASACS30L 1 3920091 AC200V 6 KVA 50/60Hz (MAL250NL) W700D1200H1450 W300D1200 2 600,000 66F70750UV ( )UV Exposure Conveyor USHIOUVC 2533/1 HNLC6 CR01W1170 D720 H1880 3 200V 350,000 67F50258 Wafer edge profilerLEO LEO COBELCOLEP 4002003 SET.

8 (6 ) 500,000 68XD5A83 Wafer inspection microscorpe OLYMPUSMX50A FAL100 LM82009 10 :x5 10 20 50 100 : AL100 LM8 : SERVO DESK CD 2,000,000 69F50338 Wafer resistance shape inspectionLEO LEO COBELCORPW 1000M2004 SiC 100 / 125 / 150 200 300 m : / ( ) 4,000,000 70 XEBTA3 Wafer bumps inspection HITACHIWB31002004 :5 6 8 : = =20mm YAG : 532nm 50mW 3B : 658nm 500,000 71FB0273 Wafer transfer unitYDKA urora EFEM :200mm 300mm :W1855 D1155 H2040mm :W600 D700 H1700 :JEL 4 3,000,000 72FB0272 Wafer transfer unitYDKtriton EFEM :200mm W1855 D1155 H2290mm.

9 JEL 4 1,800,000 73F50363 Wafer peeling DAITRON 2,000,000 74G20118 Wafer backside laser marker CANONFLAG 150020063 AC200V 50/60Hz 6 KVA W1750 D1580 H1690 1,000,000 75NE4AB5 Clear shaving machine TECHNO DAIICHICS3 380 300,000 76NE4AB4 ( )Shaving machineLSV 01 300,000 77NE4AB1 ( )Shaving machine DAIICHI SEIKOSCS7 4102013 300,000 78G50085 Stamper backside polisherSIBERTMBF1502001 220V 10% 50/60Hz 2 KVA 270mm 255mm 100 1000rpm 200mm 100 1500rpm 2 Bar(8 28 PSI) 550,000 79F30415 Spin coater ACTIVEACT 900AS2005 : 600mm :1250x1250x2130mm :3 200V 50/60Hz 700,000 80FB0305 Spin coater MIKASA1H 360S1991 :AC100V 50/60Hz 7A :300 5000rpm 200 3000rpm : 120 : 200 3 200,000 No.

10 No 81F70368 Spin dryer SEMICON CREATESCC8402000 :0 1000rpm (TSK 15) :W800xD1080xH1120mm : 490mm :3 200V 350,000 82F41115 Die bonderCAMMAXDB4002001100V 400,000 83FB0262 Dispenser MUSASHIML 606GX / 3 LED 20,000 84T94704 Dispenser MUSASHIML 606GX / 3 LED 25,000 85TD3S66 Dispenser MUSASHIML 606GX / 3 LED 25,000 86FB0263 Dispenser MUSASHIML 808FX 30,000 87G60003 Dispenser MUSASHIML 808 FXcom 30,000 88G60004 Dispenser MUSASHIML 808 FXcom 30,000 89FB0265 Dispenser MUSASHIMS 10DX 15.