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nXDS Dry Scroll Pump Brochure - edwardsvacuum.com
Tip seal service kit A735 01 801 Bearing service kit A735 01 802 Controllers The TIC (Turbo and Instrument Controller) automatically recognises the nXDS pump when connected to the backing pump connector as the controller adopts serial communications mode when connected to the nXDS. There is no need to use a relay box to interface to nXDS.
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