PrismaPlus - hakuto-vacuum.jp

1 PrismaPlus The precise solution for mass design. Powerful software. Wide range of 2 The precise solution for mass combination of high sensi tivity, maximum stability andintelligent operation make the PrismaPlus the perfectsolution for mass spectrometry. Its modular design offers you a variety of application options in industrial and analytical environments, in research& development, in leak detection and semiconductor production, as well as in coating technology. The PrismaPlus is the ideal solution for applications ranging from quality assurance and residual gas analysisright through to complex, quantitative Quadera software is a further plus. In addition to beingespecially easy to operate, it also serves as an easy-to-readplatform for transferring all measured data.

2 Together with a wide selection of interfaces, such as digitaland analog inputs and outputs or Ethernet, integration intoyour system is easily product and service professionals around the worldstand ready to provide you with application assistance onthe implementation of the PrismaPlus . Many decades of customer and application-specific experi-ence make Pfeiffer vacuum your ideal added plus for gas analysis!AcceleratorCoatingResearch & Development3 Advantages at a glanceModular design offers optimum adaptability Compact size yet high performanceA variety of interfaces make for simplesystems integrationNetworkable through EthernetHigh measurement speed, stability andresolutionInterchangeability of analyzers and electronicsTwo filaments mean maximum up-time Lowest detectable partial pressure 1 10-14hPa (mbar) Connectable Pfeiffer vacuum total pressure gaugeIntuitive operation of the Quadera softwareWorld-class support and worldwide on-site service4 PrismaPlus The precise solution for mass of technologiesBiased ionization chamberBiasing the ionization chamber results in an extremely low background signal.

3 The electron-emitting filament is positively biased relative to ground. This design preventsdesorption of gas particles from the chamber walls, andthus the generation of an undesired background signals byelectron stimulated technologyOne of the most important factors in the performance of a mass spectrometer is the transmission of the ions fromthe ion source into the mass filter. With the aid of field-axis technology, the ions are able to cross the peripheral fields of the separating system without anynoteworthy interaction. This enables a high level of sensitivity (A/hPa) to be achieved without the need for preand post Ionizatione - + 150 V DC+ 75 V DCMass filter+ 150 V+ 140 VIons(10 eV energy)Ionization150 eVenergyIons5 PrismaPlus Quadera An INFICON productSelection windowCalibration and tuningTools, aidsUnit selectionClicking on the icons in the selection window launches the measurement Quadera software is a further its modular design, it offers an easy-to-read, user-friendly platform for capturing and visualizing measured data andparameter records.

4 Complete measurementprocedures can be programmed. User-friendly, intuitive operationCustomer-specific user interfaceAutomated measurement routines via the integral VSTA script editorMeasured data interchange through I/O moduleWith stored library: Containing manycommon gases Simple definition of measurement recipesMass spectrometer data can be linkedwith external signalsTemplatesQuadera The PrismaPlus software!6 Leak detection with helium Visualization as a function of timeAnalysis of air as ion current and concentration as a function of timeMeasurement of differentmasses vs. time. Displayas partial pressure in portrayal of the ion current and its curve as a function of timeAnalog spectrum of airMeasurement modes7 Order matrix PrismaPlus1)With open ion source only2)Ion sources with tungsten filament only3)Electronics removed4)See dimensions page 115)See page 10PT M0a bcd efgDetector versionaFaraday1)only for leak detection and high- vacuum residual gas analysis5C-SEM/FaradayC-SEM = Continuous Secondary Electron Multiplier for fast, sensitive UHV residual gas analysis,analytical applications and leak detection6 Mass Rangeb 1 100 amu11 200 amu21 300 amu3 Ion sourchecOpen ion sourcefor high- vacuum residual gas analysis; high sensitivity and good linearity 1 Gas-tight ion source for use in combination with gas inlet systems.

5 Low gas consumption, high signal-to-noise ratio2 Crossbeam ion source2)for direct gas beam inlet, without interaction with the walls of the ion source;electron energy adjustable from 0 to 100 eV3 Grid ion source2)for UHV residual gas analysis; minimum outgassing and desorption rate4 Open ion source for high- vacuum residual gas analysis; high sensitivity and goodlinearity; electron energy adjustable from 0 to 100 eV for soft ionization5 FilamentdTungsten;for UHV applications1 Yttriated iridium;low filament temperatures, high resistance to air inrushes2 Bakeout temperature3)eTo 200 C1To 300 C2 Connection4)f0 (on one axis)190 off axis2I/O module5)and VSTA software extensiongWithout option0 With I/O module for control and signal interchange via analog and digital inputs/outputs 1 With VSTA software extension for programming program sequences and for exchanging commands and data with other programs2 With I/O module and VSTA software extension38 PrismaPlus The precise solution for mass dataPrismaPlusQMG 220 F1 QMG 220 F2 QMG 220 F3 QMG 220 M1 QMG 220 M2 QMG 220 M3 DetectorFaraday (F)C-SEM/Faraday (M)Mass range1 100 amu1 200 amu 1 300 amu1 100 amu1 200 amu1 300 amuRod system, diameter/length6 mm / 100 mmMin.

6 detection limit, Faraday1)1 10-12hPa2 10-12hPa 4 10-12hPa5 10-12hPa1 10-11hPa2 10-11hPaMin. detection limit, C-SEM1) 1 10-14hPa<2 10-14hPa <4 10-14hPaAr sensitivity, Faraday1)1 10-3A/hPa 6 10-4A/hPa 3 10-4A/hPa 5 10-4A/hPa 3 10-4A/hPa 10-4A/hPaAr sensitivity, C-SEM1) 200 A/hPa200 A/hPa100 A/hPaMax. operating pressure2), Faraday operation1 10-4hPaMax. operating pressure, C-SEM operation 1 10-5hPa1 10-5hPa1 10-5hPaContribution to adjacent mass (40/41)1)< 10 ppm< 20 ppm< 50 ppm< 10 ppm< 20 ppm< 50 ppmOperating temperature, analyzer150 COperating temperature, electronics0 40 CBakeout temperature, analyzer3)200 C / 300 CConnection flangeDN 40 CF-FResolution at 10 % peak amuMeasurement speed, analog/bargraph scan20 ms 60 s/amuMeasurement speed, Stair2 ms 60 s/amuMeasurement speed, MID2 ms 60 s/amuNumber of measurement channels in MID128 Reproducibility of peak ratio %InterfaceEthernetInput, digitalExternal protectionSupply voltage90 260 V AC, 50/60 HzWeight4) kg1)For open ion source2)With emission current reduced to mA.

7 1 10-3hPa3)Defined by order number4)For variant with elektronic and analyzer on one axis (0 )AccessoriesI/O module 220PT M28 699SP 220 power supply (inclusive power cable)PT 160 200 ActiveLine, PKR 3605), 1 10-9 1,000 hPaPT T02 350 010 ActiveLine, PKR 3615), 1 10-9 1,000 hPaPT T03 350 010 ActiveLine, PBR 2605)6), 5 10-10 1,000 hPaPT R27 000 ActiveLine, TPR 2805), 5 10-4 1,000 hPaPT R26 950 Connection cable, ActiveLine gauge QMG 220, m5)PT 448 249-TDigiLine, PPT 2005), 1 10-4 1,000 hPaPT R38 130 DigiLine, HPT 2005)6), 5 10-10 1,000 hPaPT R39 350 DigiLine, MPT 2005), 5 10-9 1,000 hPaPT R40 350 Connection cable, DigiLine gauge QMG 220, 3 m5)PT 348 223-TChambers and gas inlet systemson request5)Can be used only in conjunction with I/O module6)Additional SP 220 power supply necessary9++Differentially pumped PrismaPlus for processes between 1 10-7and 8 hPa (mbar) PrismaPlus on a residual gas analysis systemI/O module 220(optional)SP 220 power supplyincluding power cableSoftwareApplicationsThe PrismaPlus is the optimal solutionfor leak detection , residual gas analysis orcomplex, quantitative analyses.

8 MetallurgyVacuum furnacesAcceleratorsSputter process analysisSemiconductor productionGlass coatingResearch & developmentVacuum process systemsLithography plantsElectronics unit QME 220 0 or 90 connectionAnalyzer QMA 200 Faraday, C-SEM/FaradayScope of delivery10 Ethernet24 V DCTotal pressure measurement with ActiveLineTotal pressure measurement with DigiLine Voltage: 90 260 V ACFrequency: 50 60 HzSP 220 power supplyL x W x H:145 x 75 x 40 mmCable length: 3 mWeight: kgI/O module Connection optionsAnalog outputsAnalog inputsDigital outputsDigital inputsNumber45165 Specification0 10 V-10 +10 VVout= 24 VVin= 24 VResolution12 bit14 bit Application examples Measured values,Reading in external Free assignmentStarting or ion currentsvalues, pressure,of switchpointsmeasurement Ratios temperature, gas flow Valve actuationtasks by means of (concentrations)

9 External signal Data transfer to higher-levelsystems11 QMG 220 F 0 QMG 220 F 90 QMG 220 M 0 QMG 220 M 90 DN 40 CF-F 376010 *141 40 40 CF-F141 118DN 40 CF-F * 37DN 40 CF-FCrossbeam ion sourceCrossbeam ion sourceDimensions in mmDimensionsDimensions in mm* Gas-tight ion source = ion source = 92 All data subject to change without prior 0087 PEN (December 2016/5) vacuum SOLUTIONS FROM A SINGLE SOURCE Pfeiffer vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable RANGE OF PRODUCTS From a single component to complex systems:We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Benefit from our know-how and our portfolio of training opportunities!

10 We support you with your plant layout and provide first-class on-site service you looking for a perfect vacuum solution?Please contact us:Pfeiffer vacuum GmbHHeadquarters GermanyT +49 6441