電漿源原理與應用之介紹 - psroc.phys.ntu.edu.tw

1 2006 4 440 / , 1. , (Heterogeneous Interactions) (Plasma Sheath) (DC discharge) ( KHz MHz), ( ) ( ) (mTorr Torr)

2 1 2-1 ( ) (Inductively-Coupled Plasma, ICP) ICP ( ) (column, solenoid) (planar) (coil) kHz MHz 1 ICP ( ) (dielectric window ) RF 2006 4 441 (B) RF (E) (Jp) (primary) (secondary) ICP (Transformer Coupled Plasma, TCP) ( ) (Threshold Current ) (Inductive Mode, H mode) ICP (n ~ 1010- 1012 cm-3) (n ~ 109- 1010 cm-3) (High Density Plasmas, HDP) ICP (Ohmic heating) (Stochastic heating)[1] (weakly ionized plasma)

3 ICP 1 ( MHz RF, n ~ 1010 1012 cm-3) RF RF (skin depth ~ cm) (bulk plasma) (collisionless heating) Helical ICP Spiral planar lCP ( 2 2 ICP B fieldDielectric windowMatch Induced RF E fieldCoil RF Power 1 coil window RF electric plasma skin e Distance from the window 2006 4 442 4 (a) SEM (b) 10 [6] 3 (a) (SEM) (TEM) [3] (b) SEM [5] )

4 Spiral coil [2] (Catalytic Plasma Enhanced Chemical Vapor Deposition, Catalytic PECVD) (Carbon Nanotubes, CNT) (Carbon Nanofibers, CNF) Catalytic CVD CNT/CNF CNT/CNF CNT/CNF / CNF [3] 3(a) (Langmuir probe) RF RF [4] CNF (in situ) CNT/CNF ( ) CNT/CNF CNT/CNF CNT/CNF CNF 3(b) CNF - [5] (Single-Walled Carbon Nanotubes, SWNT)

5 CNF SWNT CNF SWNT 4 [6] SWNT 2006 4 443 1990-1995 200 mm 300 mm 21 2-2 ( ) ( ) p > (1+ )1/2 ( ) (plasma surface wave) GHz 1011 cm-3 1-2 cm [7-10] 5 (1) (2) plasma 5 ( 5 12 2 5 1011cm-3 6 6 5 2006 4 444 30 mTorr 50cm 25cm 10% ( 7 ))

6 8 30 mTorr kW 1012cm-3 12 V 1030500 204060z (cm)206010004080120ion current density (mA/cm2)pressure10 mtorr30 mtorr60 mtorr580 mtorr101001000pressure (mtorr)plasma density ( cm-3) Microwave power2500W2000W1500W1000W101210131011 7 8 (plasma resonance)[9] p = 1- p2 / 2 , p electric displacement, D = p E, p p= 8 [11-19] 10 8 kW 2-3 ( ) (Low-pressure)

7 1970 100 2006 4 445 9 10 (Chemically active species) (Corona Discharge ) (Dielectric Barrier Townsend Discharges) 1988 [20] (Atmospheric Pressure Glow Discharge Plasmas, APGD) (Atmospheric Pressure Glow Discharge Plasma Jet, APPJ) [22,23] [20,21] 11 (Dielectric plates) 11 (< Torr) 10,000 (Secondary Emission Electrons)

8 2006 4 446 (Avalanche) (Breakdown voltage) ( ) 12 (multiplication) (He Metastables) ( ) (~20 eV) 12 (Preionization) 1-100 kHz 13 13 (1) [22,23] (2) (3) (4) PC (5) 2-4 ( ) (Inductively Coupled Plasma Torch ICP To rch ) (AC Plasma Torch) (DC Plasma Torch)

9 2006 4 447 14 ( ) ( ) ( ) 1 atm 102 107 Amp/cm2 5 20 V/cm [24] 10-7 / (Vortex flow) ( 10-9 10-10 / ) (Transferred DC Plasma Torch) (Non-Transferred DC Plasma To rch ) (swirler) , [25] (1) (2) , DC/DF.

10 (1) , DC , DF ( ) (1) DC/DF 1 8 4 DC/DF 1 , DC/DF > 8 2006 4 448