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1 Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA .. EPMA .. a,* b c . a JFE 210-0855 . b . c 565-0871 . 305-0047 . *. 2005 11 2 2005 11 28 . (EPMA) (EDS) . (SEM) . JSA(Journal of Surface Analysis) . EPMA SEM-EDS . EPMA .. Questionnaire survey for EPMA and EDS analyses at actual laboratories a,* b c S. Hashimoto , T. Nagatomi and T. Kimura a JFE-Techno-Research Corporation, Kawasaki, Kanagawa 210-0855, Japan b Osaka University, Suita, Osaka 565-0871, Japan c NIMS, 1-2-1 Sengen, Tukuba 305-0047, Japan *.

2 (Received: November 2, 2005 ; Accepted: November 28, 2005). Electron probe microanalyzer (EPMA) and scanning electron microscopy equipped with an energy disper- sive spectrometer (SEM-EDS) have been widely used as tools for practical analysis at laboratories in various fields of manufacture, research and development, academic research, etc. Unfortunately, a present status of those techniques in actual analytical works has been rarely reported, because, probably, those techniques have been too established to be reported in scientific journals.

3 For clarifying the present status of those techniques, the editorial board of JSA (Journal of Surface Analysis) has performed questionnaires for members of the Surface Analysis Society of Japan. In the present report, the questionnaire survey is summarized. Copyright (c) 2005 by The Surface Analysis Society of Japan - 405 - Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA . 1. b . ( ) . (EPMA) . c.. (SEM-EDS) d.. e.. (2) EPMA EDS . a. EPMA . EPMA EDS b. EDS . AES XPS c.. d.. ( )EPMA EDS . ( sasj ) EPMA EDS.

4 ( )EPMA EDS EPMA. EDS .. ( )EDS ( . ) .. 2005 7 EPMA ( )EPMA ( . ) . sasj . (3)EPMA EDS . ( ). a.. EPMA EDS b.. sasj c.. sasj X d.. e.. f.. EPMA (3. 1) .. ( ) . ( ) . ( ) ( EP MA. EDS . 2. EPMA, EDS . sasj . 5 mm . [ sasj 944] ). EPMA (4) . (WDS) EDS SEM . EDS . ( 1 ) 3.. ( ) 2 . a.. - 406 - Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA .. EDS WDS(EPMA) .. EDS . EPMA . (0) 19 1 1 SEM-EDS EDS . 17( 8 4 EDS . 5) . (1) EDS EPMA . ( ) . ( ) . 1 .. EPMA EDS .. 10. SEM . 14 ( ) . X . 15 EDS . 7 EPMA . ( mm cm ).

5 0 . 1 EDS . or . EPMA . (2) EPMA EDS ( ) .. 2 EPMA EDS . EPMA .. EDS EPMA . EPMA 0 . EPMA . EDS 4.. 15 EDS .. 0. EPMA .. ( )EDS (EPMA EDS . ) EDS EPMA EDS . EDS . ( )EDS EPMA ( . EPMA . ( )EPMA EDS EPMA ) . EDS EDS . EPMA EDS 5 4 1 ( 0 ) . EPMA EPMA 6 5 1 ( 0 ) . - 407 - Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA . 5 . 3 EPMA EDS .. 4. EDS EPMA 14.. 1. 88 1 62 2. 60 2 61 3 ( ) . 33 4 55 4 .. 57 3 76 1 . 39 5 ( ) .. 0 2 6 100 m . EPMA .. (3)EPMA EDS .. 4 EPMA EDS .. ( ) .. 6.. 14 EPMA .. 12.. 13.

6 15.. 3 .. ( ) . mm 2 m m . ( ) . ( ) mm . mm 50 mm .. ( ) .. - 408 - Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA .. ( . ) ( EDS . ) . ( ) EPMA .. EDS SEM . or . EPMA EDS .. EPMA .. (4) .. 6 . mm m .. 10.. 8 .. 1.. 70 . 4 .. 19 . EPMA EDS EPMA EDS .. EPMA EDS .. 4. 1 .. EP MA . EDS EPMA EDS .. (1) ( . ) . EPMA EDS ( . EPMA SEM-EDS ). - 409 - Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA . (2) .. (3) . (4) .. (5) .. (6) . ISO TC202 WDS EPMA .. (AEM) (EELS). SEM . EDS .. ISO (.)

7 J S A ( ) . ( ) [ 1 ] ) . ISO EPMA .. ( ).. ( ) EDS.. 1 SEM/EDS .. ( ). EPMA . EPMA . 202 ISO .. (CRMs) . ISO14595: 2003. [2]. ISO14594: 2003 EPMA [3]. ISO17470: 2004 EPMA [4]. ISO22029: 2003 EMS/MAS [5].. ISO15632: 2002. [6]. - 410 - Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA . EDS EPMA . EPMA EDS .. EDS EPMA . 5.. EPMA EDS . EPMA. EDS .. EPMA EDS .. ( ) . X P S A E S . EPMA EDS .. FE-EPMA .. nm . SEM EPMA FE .. EPMA .. EPMA EDS .. FE-EPMA[7] FESEM-EDS[8] . ( [1] J. Murayama, J. Surf. Anal. 12, 369 (2005).

8 JSA (JEOL) [9] [2] ISO14595 . ) EMPA CRMs . (2003). EDS [3] ISO14594 EPMA . X (2003). EDS [4] ISO17470 EPMA . (2004). EDS [5] I S O 2 2 0 2 9 . EMSA/MAS (2003). [6] ISO15632 - . [10] X . - 411 - Journal of Surface Analysis No. 4 (2005) pp. 405 - 412. EPMA . EPMA . (2002). [7] T. Kimura, K. Nishida, S. Tanuma and H. Yamamoto, J. Surf. Anal. 10, 203 (2003). [8] T. Sakurada, S. Hashimoto, Y. Tsuchiya, S. Tachibana, M. Suzuki and K. Shimizu, J. Surf. Anal. 12, 118 (2005). [9] H. Takahashi, J. Surf. Anal. 12, 390 (2005). [10] K.

9 Tanaka, A. Nagata, N. Sasayama, M. Ikeda, A. Odawara, S. Nakayama and K. Chinone, J. Surf. Anal. 12, 122(2005). - 412.