Transcription of SEM の EDX 装置による定性・定量分析の技術向上 …
1 SEM EDX SEM TEM X EDX EDX SEM-EDX EDX 1 2 3 SEM-EDX 3 EDX SEM EDX 1. X 1-1. X X X X E keV nm E= 1-2. X -1 FE-SEM S-4800 -2 6610A -3 SEMEDX-TypeH -1 LII MIII K X K 1 K 1 1 2 1 2 K K K K L L M 1-3.
2 -2 SRM66-Fe S-4800-EMAX 1-4. -3 K L -1 X -2 Fe -3 -1 -1 g/cm3 m nm 25eV 15eV 5eV C( ) 6 423 Mg 12 475 533 Al 13 287 288 Si 14 352 458 S 16 326 453 Ca 20 205 545 Ti 22 180 Cr 24 635 717 110 Fe 26 532 638 Cu 29 406 547 Ge 32 575 883 133 Mo 42 548 884 413 433 Pd 46 138 748 854 182 364 Sn 50 540 580 Ta 73 458 529 182 236 W 74 443 529 160 197 Pt 78 352 454 122 175 p i n Au Au 20nm Si Li 500 1000V FET X Ex KeV eV -4 EDX Si Li ih 1-5.
3 SEM Energy Dispersive X-ray Spectrometer EDX EDS Wavelength Dispersive X-ray Spectrometer WDX WDS 2 EDX Solid State Detector SSD WDX -4 EDX Si Li EDX WDX -2 -2 EDX WDX EDX WDX EDX 1 EDX 1 % 2. 2-1. A X IAU 100 X IAS IAU IAS Z Absorption Fluorescent Excitation CA IAU IAS ZAF ZAF EDX WDX CH 5B 6C 92U 5Be 92U 130 150eV 10 20eV 30 400 20 10-9 10-10A 10-7 10-9A WDX 100 2-2.
4 Cha con p ex 2 3 -5 -6 6-a WD 6-b WD 6-c ZAF -7 a b c EDX Si cha con p ex -5 -6 X -7 Si-K Si-K EDX 2 Dead time 35% SiO2 O-K +Si-K Si-K +Si-K SEM 20Pa 10% 200 Pa 60% 3.
5 3-1. Fe SRM66 -4 HB Ai2O3(56%)-SiO2(40%) Z-11 ZrO2( )-CaO( ) -5 2 3-2. SEM-EDX FE-SEM S4800 -1 6610-A -2 SEMEDX-TypeH -3 3 3-3. 15kV 30kV 2 WD 15mm SEM-EDX S4800 6610-A 4. -3 30kV 15 kV Dead Time 30kV 35% 15 kV 3% 30kV -3 SRM663 S-4800 % 30kV(%) 15kV(%) 6610 30kV(%) 15kV(%) C C Si Si P P Mn Mn Fe Fe -4 SRM-66 -5 Zr-11 HB -3a S4800 6610A -3b TypeH EMAX SRM665 -3 P S Mn Mo 30kV C Fe Si -4 -4 SRM665 30kV S-4800 6610-A Mn Si SEMEDX-TypeH ZAF Z -3b Z 30kV S-4800 Z + 6610A Mn WD 2-2- -8 8mm 8-b WD15mm 8-a 1/20 WD25mm 8-c 1/5 20kV 2-4 -1 FE-SEM nm X Mo Mo
6 ZAF % 30kV(%) 15kV(%) ( Z) 30kV(%) 15kV(%) C C Si Si P P Mn Mn Fe Fe Mo Mo SRM665 % S-4800 6610-A TypeH C Si Fe -8 WD a b c Si Si Si Mn Fe Mn Fe Mn Fe FE-SEM S4800 -EDX -5 -5 -5 FE-SEM S4800 -EDX 1 SEMEDX-TypeH -2 EDX S4800 EDX Pb U 5. FE-SEM EDX EDX Pb U EDX EDX EDX 6.
7 23 6 7. SEM 31-75 2010 II 30-31 Zr-11 % S-4800 HB % S-4800 CaO SiO2 40 ZrO2 Al2O3 56 4 U
