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SEM-EDXを最大限活用する - Horiba
x線発生量 デッドタイム 繰返し再現性 ダメージ コンタミネーション 低 高 小 大 低 高 ビーム電流 低 高 ビーム電流とx線発生量、デットタイム、繰返し再現性、サンプルダメージの関係 悪い 良い （スペクトル測定、元素マッピングに適した
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www.geo.umass.edugenerate x‐rays 4) X‐rays generated from the beam‐specimen interaction are characterized by energy and wavelength to identify the element, intensity is used to analyze concentration A) Energy Dispersive Spectrometers (EDS): count number and energy of emitted x‐ray photons