SLA5800 Series - Serv'Instrumentation

1 1 The SLA5800 Series mass flow meters and mass flow controllers have gained broad acceptanceas the standard for accuracy, stability and reliability. These products have a wide flowmeasurement range and are suitable for a broad range of temperature and pressure conditionsmaking them well suite for applications in chemical and petrochemical research, laboratory,analytical, fuel cell and life science among of the SLA5800 Series mass flow products include: industry leading long termstability, accuracy backed by superior metrology systems and methods using primary calibrationsystems directly traceable to international standards, and a broad range of analog and digitalI/O options to suite virtually any application.

2 An independent diagnostic/service port permitsusers to troubleshoot or change flow conditions without removing the mass flow controllerfrom SLA5800 Series provides a highly configurable platform based on a simple modulararchitecture. The SLA5800 Series feature set was carefully selected to enable drop-inreplacement and upgrade of many brands of mass flow controllers. With the wide range ofoptions and features available, the SLA5800 Series provides users with a single platform tosupport a broad range of SheetSLA5800 SeriesThermal Mass FlowOverviewOverviewOverviewOverviewOver viewPrPrPrPrProduct Descriptionoduct Descriptionoduct Descriptionoduct Descriptionoduct DescriptionElastomer Sealed, Digital.

3 Thermal Mass Flow Meters and ControllersModel SLA5850 FeaturFeaturFeaturFeaturFeatures and Benefitses and Benefitses and Benefitses and Benefitses and BenefitsFeaturFeaturFeaturFeaturFeatures esesesesBenefitsBenefitsBenefitsBenefits BenefitsIndustry leading long term sensor stabilityIncreased system uptime and reduced cost of ownership by reducing maintenance and eliminatingperiodic recipe adjustments and/or recalibrationsUser accessible service portSimplified installation, start-up, troubleshooting and access to diagnostics provides maximum uptimeAdvanced diagnosticsEnsures device is operating within user specified limits for high process yield uptimeSuperior valve technologyMinimum leak-by, wide turndown.

4 Fast response and superior corrosion resistant materials reduces overallgas panel cost and increases throughputAdaptable mechanical configurationsEasily retrofit to existing systemsPrimary standard calibration systemsEnsures measurement accuracy is traceable to international standardsSimple modular designEasy-to-service elastomer sealed design provides for factory or field service maximizing uptime andreducing total cost of ownershipDS-TMF- SLA5800 - Series -RevB-MFC- engJune, 20142 PrPrPrPrProduct Descriptionoduct Descriptionoduct Descriptionoduct Descriptionoduct DescriptionAdvanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement SensorBrooks' sensor technology combines.

5 Excellent signal to noise performance for improved accuracyat low setpoints Superior long-term stability through enhanced sensormanufacturing and burn in process Isothermal packaging to reduce sensitivity to externaltemperature changesAdvanced DiagnosticsAdvanced DiagnosticsAdvanced DiagnosticsAdvanced DiagnosticsAdvanced DiagnosticsThe mass flow controller remains the most complex and criticalcomponent in gas delivery systems. When dealing with highlytoxic or corrosive gases, removing the mass flow controller todetermine if it is faulty should be the last resort. In responseto this, Brooks pioneered smarter mass flow controllers withembedded self test routines and introduced an independentdiagnostic/service port to provide the user with a simpleinterface, for troubleshooting without disturbing flowcontroller Flow RangeWide Flow RangeWide Flow RangeWide Flow RangeWide Flow RangeThe SLA5800 Series covers an extremely broad range of flowrates.

6 Model SLA5850 can have a full scale flow as low as 3ccm. With a high turndown ratio of 100:1 for any full scalerange from 1-50 lpm N2 equivalent and 50:1 turndown for allother flow rates, accurate gas flow can be measured orcontrolled down to ccm! Model SLA5853 can monitor orcontrol gas flows up to 2500 Response PerformanceFast Response PerformanceFast Response PerformanceFast Response PerformanceFast Response PerformanceThe all-digital electronics and superior mechanicalconfiguration in the SLA5800 Series provide for ultra fastresponse Array of Communication OptionsBroad Array of Communication OptionsBroad Array of Communication OptionsBroad Array of Communication OptionsBroad Array of Communication OptionsBrooks offers traditional 0-5 volt and 4-20mA analog optionsas well as RS-485 digital communications ( S-protocol , basedon HART)

7 Brooks also offers control interfaces via digitalnetwork protocols like DeviceNet, a high speed (up to 500kbaud) digital communication network, and Profibus. Brooks'communication capabilities and device-profiles have beencertified by the ODVA (Open DeviceNet Vendor's Association)and the ITK (Interoperability Test Kit). Other network protocolsare in development. Talk to your Brooks representative aboutyour specific CapabilitiesMulti-gas/Multi-range CapabilitiesMulti-gas/Multi-range CapabilitiesMulti-gas/Multi-range CapabilitiesMulti-gas/Multi-range CapabilitiesThe SLA5800 Series multi-gas and multi-range capabilitiesreduce inventory. Storage and pre-programming of up to 6gas calibrations easily permits users to switch betweendifferent gasses and ranges on a single oduct oduct oduct oduct ApplicationsApplicationsApplicationsAppl icationsApplicationsFuel Cell Test StandFuel Cell Test StandFuel Cell Test StandFuel Cell Test StandFuel Cell Test StandFuel cell test stands are used to measure the efficiency of thefuel cell.

8 These devices rely on stable, accurate mass flowcontrollers with wide turndown and fast response. High-performance Brooks' products are ideal for this ' digital gas mass flow controllers can respond to asetpoint change in less than 1 second. The SLA5800 Seriesprovides excellent response, a wide dynamic flow and pressurerange, and extremely stable, low zero drift ResearchThe challenge is scaling up the catalyst process from thelaboratory to the pilot plant and, ultimately, to productionlevels. It is imperative that the amount of feed flowing throughthe research catalyst bed be precisely measured so that theconversion rate and selectivity can be accurately calculated andscaled up ' SLA Series thermal mass flow controllers and Quantim Series Coriolis mass flow controllers have been selected bymany companies involved in catalyst research because theseinstruments provide exceptional precision, wide dynamic range,and superb stability.

9 The SLA5800 Series ' improved turndownratio and reduced sensitivity to external temperature changesmakes it ideal for critical measurements where the compositionor thermal properties of the feeds vary. Both Series areavailable for extremely high pressure service, have appropriatearea classifications, and are offered with a variety of wettedmaterials. The 0254 secondary electronics may be used toprovide power, set point, and local able able able able TTTTTop Biorop Biorop Biorop Biorop BioreactorseactorseactorseactorseactorsB rooks has earned a leading reputation in controlling of gasflows for bioreactor 1350 and 1355 Sho-RateTM variable area flow meters withintegral needle valves are ideal for small systems with manualgas adjustment.

10 For applications where dissolved oxygen andpH control are more critical, mass flow controllers provide thenext level of precision and automation. Brooks offers a widerange of solutions including multiple gas calibrations on theSLA5800 Series . With optional digital communication protocolsand other features offered by the SLA5800 Series , it is ideallysuited for the table top InstrumentTMPRECISION MASS FLOW4 PrPrPrPrProduct Specificationsoduct Specificationsoduct Specificationsoduct Specificationsoduct SpecificationsSLA5850/60 SLA5850/60 SLA5850/60 SLA5850/60 SLA5850/60 SLA5851/61 SLA5851/61 SLA5851/61 SLA5851/61 SLA5851/61 SLA5853/63 SLA5853/63 SLA5853/63 SLA5853/63 SLA5853/63* Response time can be improved upon requestPerformancePerformancePerformance PerformancePerformanceFlow AccuracyFlow AccuracyFlow AccuracyFlow AccuracyFlow Accuracy+ of (20-100% ), of (20-100% )