Springless Diaphragm Valves - Swagelok

1 Springless Diaphragm Valves for High Performance DP Series 1. Spr ingle s s D iaphragm Valve s for High Pe r for ma nce Diaphragm . DP Se r ie s DP SERIES. Suitable for ultrahigh-purity applications 316L VIM-VAR stainless steel body Low-pressure and high-pressure models VCR , tube butt weld , and modular surface-mount end connections Manual or pneumatic actuation 2 Bellows- and Diaphragm -Sealed Valves Contents Features .. 2 Ordering Information and Dimensions Models .. 2 Low-Pressure Valves .. 5. Technical Data.

2 2 High-Pressure Valves .. 6. Materials of Construction .. 3 IGC II Modular Surface-Mount Valves .. 7. Process Specifications .. 3 Options and Accessories .. 8. Performance Specifications .. 3 Multiport and Elbow Valves and Monoblock Manifolds .. 8. Flow Data .. 3. Maintenance Kits .. 8. Actuation Options .. 4. Features Models Seat Low-Pressure Fully contained PCTFE seat design Pressure rating: 250 psig ( bar). provides: Diaphragm . Temperature rating: 10 to 150 F. DP SERIES. excellent resistance to swelling and ( 23 to 65 C).

3 Contamination Flow coefficient: improved helium leak test performance minimal particle generation High-Pressure Pressure rating: 3045 psig (210 bar). long cycle life. Temperature rating: 10 to 150 F. Diaphragm ( 23 to 65 C). Cobalt-based superalloy (UNS R30003) Flow coefficient: material for strength and corrosion resistance Optimal design for long cycle life Body 316L VIM-VAR stainless steel body material for ultrahigh-purity applications Fully swept flow path minimizes entrapment areas facilitates purging maximizes flow capacity.

4 Technical Data Working Pressure Temperature Rating Pneumatic Actuator psig (bar) F ( C) Flow Internal Actuation Air Short-Term Coefficient Orifice Volume Pressure Displacement Model Operating Burst Operating Bakeout (Cv ) in. (mm) (cm3) psig (bar) (cm3). Low- Vacuum to 3200 60 to 120 ( ). pressure 250 ( ) (220) 10 to 150 302 (150) ( to ) ( ). (body with High- Vacuum to 12 200 ( 23 to 65) (valve open) ( ) 70 to 120 BW4 ends). pressure 3045 (210) (840) ( to ) ( ). See Options and Accessories, page 8, for high-temperature seat materials.

5 Springless Diaphragm Valves for High Performance DP Series 3. Materials of Construction Material Grade/ASTM Specification Component Low-Pressure High-Pressure Body and integral end 316L VIM-VAR SS/. connections SEMI F20 Ultrahigh-Purity . Welded VCR end 316L VAR SS/. Pneumatic connections SEMI F20 High-Purity . actuator Swagelok tube fittings 316 SS/A276. Seat PCTFE/D1430. Diaphragm Cobalt-based superalloy (UNS R30003)/AMS 5876. Silver-plated cobalt-based superalloy Support Diaphragm (UNS R30003)/AMS 5876.

6 Washer S17700. Bonnet nut Bonnet S17400 SS. Bonnet nut 316 SS. Pneumatic Actuator Bonnet Cylinder, cap, pistons Aluminum Button O-rings Buna N. Washer Springs S17700 SS. Support Diaphragm Button 316 SS. Diaphragm Manual Actuator Seat Actuator 316 SS. Button 316 SS. Body Directional handle Nylon with stainless steel insert Diaphragm . DP SERIES. Integral lockout handle Glass-filled nylon with stainless steel base End connections Round handle Polyester with stainless steel insert 316 SS with epoxy Toggle handle.

7 Coating High-Pressure Wetted components listed in italics. Pneumatic Actuator Shown O-rings are lubricated with PTFE-based lube; no lubricants on wetted components. 20 % minimum elongation allowed. Process Specifications See Swagelok Ultrahigh-Purity Process Specification (SC-01) catalog, MS-06-61; Swagelok Photovoltaic Process Specification (SC 06) catalog, MS 06 64; and Swagelok Special Cleaning and Packaging (SC 11) catalog, 06 - 63, for details on processes, process controls, and process ver i fi ca tion.

8 Assembly and Process Process Wetted Surface Cleaning Packaging Designator Specification Roughness (Ra) Testing Ultrahigh-purity cleaning with Performed in ISO Class 4 Ultrahigh- a continuously monitored, work areas; Valves are double Purity Process P Inboard helium leak tested deionized water, ultrasonic bagged and vacuum sealed Specification cleaning system in cleanroom bags. (SC-01) to a rate of 1 10 9. Electropolished std cm3/s at the seat, High-purity cleaning with Photovoltaic envelope, and all seals.

9 Performed in specially and finished to an a continuously monitored, Process cleaned areas; Valves are P6 average of 5 in. The DP series design has deionized water, ultrasonic Specification individually bagged. ( m) been helium leak tested cleaning system (SC-06). to maximum leak rate of Special cleaning with Performed in specially Special Cleaning 1 10 10 std cm3/s. non ozone-depleting cleaned areas; Valves are P1 and Packaging chemicals individually bagged. (SC 11). Performance Specifications Flow Data Refer to DP Series Diaphragm Valve Technical Report, MS 06 15, for additional information on helium leak testing, Low-Pressure Models High-Pressure Models Pressure Cv = Cv = particle counting, moisture analysis, hydrocarbon analysis, Drop to Water Air Water Air ionic cleanliness, and lab cycle testing data.

10 Atmosphere gal/min std ft3/min gal/min std ft3/min psig (bar) (L/min) (std L/min) (L/min) (std L/min). 10 ( ) ( ) (86) ( ) (64). 50 ( ) ( ) (230) ( ) (170). 100 ( ) ( ) (410) ( ) (300). 4 Bellows- and Diaphragm -Sealed Valves Actuation Options Manual Actuators Low-pressure Valves have blue handles as standard. High-pressure Valves have white handles as standard. Seven handle colors are available; see Options and Accessories Handle Colors, page 8. Directional Integral Lockout Quick, quarter-turn Quick, quarter-turn actuation actuation Handle shape provides Lockable in the CLOSED.