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Starting material - University of California, Berkeley

Starting Material Silicon substrate 150 mm, p-type, <100>, 36-63 ohm-cm Attila Horvath 2005. Pad Oxidation and Nitride Deposition Silicon substrate Pad oxide = 250A Silicon nitride = 2200A Attila Horvath 2005. N-Well Photo and Nitride Etch Silicon substrate Pad oxide Silicon nitride

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