Transcription of XPS - ccn.yamanashi.ac.jp
1 XPS XPS X-ray photoelectron spectroscopy (X ) XPS II II II XPS ..X JEOL Al K 1487eVMg K 1253eV , Electronic Structure and the Properties of Solids X Si (1s)2 (2s)2(2p)6 (3s)2(3d)2C (1s)2 (2s)2(2p)2O (1s)2 (2s)2(2p)4 Li (1s)2(2s)1O (1s)2(2s)2(2p)4Li2O (2s)2(2p)
2 6 Baklanov JVST 1997 (#416) X XPS h photoelectron 50 photoelectron X h Ar
3 Cu Intensity ( )Binding Energy (eV)Cu2p926930934938942946 Intensity ( )Binding Energy (eV)Ti 2p448452456460464468 Intensity ( )Binding Energy (eV)O 2s526530534538542 DepthTiOxTiN(O) + CuCuCuOx100 nm 1999 O2 5min TiN Cu Cu Intensity ( )Binding Energy (eV)Cu2p926930934938942946In tensity ( )B inding Energy (eV)Ti 2p448452456460464468 Intensity ( )Binding Energy (eV)O 2s526530534538542 DepthTiOxTiN(O)CuCuOxO2 min TiN Cu Cu OFCuBinding Energy / eVIntensity / arb.
4 UnitCu 2003E. Kondoh J. Mater. Res. 1999 JEOL XPS vs. AES XPS AES
