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주사전자현미경의 기본원리와 응용(Part Ⅱ

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KIC News, Volume13, , 2010 51 (Part II) Principle and Application of Scanning Electron MicroscopeSeok Kyun Jeong and Jung-Bum ChunElectron Microscope Research Center, COXEM Co., LtdAbstract: topography, morphology, composition crystallography . 30 , 1000 . .Keywords: SEM, electron beam, electron gun, vacuum, electromagnetic lens, coil, EDS1. 1) (Scanning Electron Microscope) 1965 3.

SEM의 전자총에는 열방사형(thermionic electron gun)과 전계방사형(field emission electron gun)으 Figure 2. Hair Pin 형태의 열방사형 전자총의 모식도[9]. 로 나뉘어진다. 열방사형(thermal emission)의 경우 음극은 주로 텅스텐으로 약 100 µm 직경의 선 필라멘트로서

  Emissions, Thermionic

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