주사전자현미경의 기본원리와 응용(Part Ⅱ
SEM의 전자총에는 열방사형(thermionic electron gun)과 전계방사형(field emission electron gun)으 Figure 2. Hair Pin 형태의 열방사형 전자총의 모식도[9]. 로 나뉘어진다. 열방사형(thermal emission)의 경우 음극은 주로 텅스텐으로 약 100 µm 직경의 선 필라멘트로서
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