Device and Process Variability - IEEE Web Hosting

2 / IEEE SCV-SF Seminar June’2017– T. Brozek - Variability Outline Why does it matter – Impact on parametric yield, speed, leakage Device variability – historical perspective and technology trends Sources of Variability and Process dependence Local Layout Effects and their Characterization Process variability and Characterization eMetrology for better process control …

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