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Device and Process Variability - IEEE Web Hosting

IEEE SCV-SF Electron devices Society SeminarDevice and Process VariabilityTomasz BrozekPDF Solutions Clara, 12 June 20172 / IEEE SCV-SF Seminar June 2017 T. Brozek - Variability Outline Why does it matter Impact on parametric yield, speed, leakage Device Variability historical perspective and technology trends Sources of Variability and Process dependence Local Layout Effects and their Characterization Process Variability and Characterization eMetrology for better Process control in advanced nodes3 / IEEE SCV-SF Seminar June 2017 T. Brozek - Variability Consequences of Device Variability Processor Speed Variability Excess Leakage Currents (IDDQ failures) SRAM Vmin marginSource: J. Farrell, AMD, C2S2 Workshop, UCB 2006 Balanced and dis-balanced Cells due to Vt mismatchSource: M.

2 / IEEE SCV-SF Seminar June’2017– T. Brozek - Variability Outline Why does it matter – Impact on parametric yield, speed, leakage Device variability – historical perspective and technology trends Sources of Variability and Process dependence Local Layout Effects and their Characterization Process variability and Characterization eMetrology for better process control …

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