Transcription of Engineering Project Proposal
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Engineering Project Proposal A Desktop Reactor for Plasma Enhanced Growth of Carbon Nanotubes Team 23 Kyler Nicholson John Taphouse Janani Viswanathan Bryan Yamasaki Sponsors Professor John Hart Dr. Michael Fl De Volder Eric Meshot University of Michigan, Department of Mechanical Engineering Section Instructor Professor John Hart December 9, 2008 2 Executive Summary There are many potential applications for vertically aligned carbon nanotubes (CNTs), including various microelectronic and micromechanical devices. Vertically aligned CNTs, especially single isolated CNTs, cannot be consistently grown using pure thermal chemical vapor deposition (CVD) system. However, recent research suggests that the addition of plasma to CVD systems can greatly enhance the probability of growing vertical CNTs.
team is to design and build a desktop sized plasma enhanced chemical vapor deposition (PECVD) system. To achieve this goal our team systematically identified customer requirements and quantitative engineering specifications. The customer requirements and engineering specifications were
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