Transcription of For Semiconductor Applications - DuPont
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For Semiconductor Applications - DuPont
DuPont kalrez 4079 For Semiconductor Applications Technical Information Rev. 4, July 2010 Product Description DuPont kalrez 4079 perfluoroelastomer parts are a black, low compression set product for use in many dry and wet Semiconductor process environments. It has excellent chemical resistance, good mechanical properties and outstanding thermal stability. kalrez 4079 exhibits low weight loss in reactive plasmas and has good response to temperature cycling effects. It is not recommended for use in amines. A maximum continuous service temperature of 316 C is suggested. Short excursions to higher temperatures are also possible. Ultrapure post-cleaning and packaging is optional.
DuPont™ Kalrez® 4079 For Semiconductor Applications Technical Information—Rev. 4, July 2010 Product Description DuPont™ Kalrez® 4079 perfluoroelastomer parts are a black, low compression set product for use in many …
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