Transcription of GaN Power HEMT Tutorial: GaN Basics
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GaN Power HEMT Tutorial: GaN Basics
GANPOWERINTERNATIONAL INC Fred Yue Fu ( ),GaNPower International Yue Fu Co-founderand COOGaNPower International Power HEMT Tutorial: GaN Basics12 Fred Yue Fu ( ), GaNPower International Session 1: GaN devices Basics GaN, An Introduction GaN Design, Fabrication and Testing GaN Compact Modeling and Reliability Session 2: Gate Driving Session 3: GaN Applications3 Fred Yue Fu ( ), GaNPower International 1960s1970s1980s20002010 Power Diode GermaniumThyristorSiliconPower BipolarSiliconPower MOSFET SiliconIGBTS iliconSchottky diodeSilicon CarbidePower HEMTGaNPower Devices: History of Evolvements4 Fred Yue Fu ( ), GaNPower International s time to move +substraten-drift regionp+ body contactpolysilicon gatesource contactn+ sourcep-well5 Fred Yue Fu ( ), GaNPower International Properties ComparisonMaterialPropertySiliconSiC-4 HGa
AlGaN PR PR PR Sapphire Substrate Buffer GaN AlGaN ②Mask 02 –S/D Ø Sourceanddraincontactto AlGaN Ø Themetalmustbe depositedafteracompletely cleanprocesstoeliminate layersbetweenAlGaNand Metal A GaN-on-Sapphire HEMT Process Flow Example ③Deposit S/D metal Ø Deposit ohmic contacts on top of AlGaN as source and drain …
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