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MOS Capacitor - Chenming Hu

1575 MOS CapacitorCHAPTER OBJECTIVESThis chapter builds a deep understanding of the modern MOS(metal oxide semiconductor) structures. The key topics are the concepts of surfacedepletion, threshold, and inversion; MOS Capacitor C V; gate depletion; inversion-layerthickness; and two imaging devices charge-coupled device and CMOS(complementary MOS) imager. This chapter builds the foundation for understanding theMOSFETs (MOS Field-Effect Transistors).he acronym MOS stands for metal oxide semiconductor. An MOS Capacitor (Fig. 5 1) is made of a semiconductor body or substrate, an insulator film, suchas SiO2, and a metal electrode called a gate. The oxide film can be as thin nm.

160 Chapter 5 MOS Capacitor n = N cexp[(E c – E F)/kT] would be a meaninglessly small number such as 10–60 cm–3. Therefore, the position of E F in SiO 2 is immaterial. The applied voltage at the flat-band condition, called V fb, the flat-band voltage, is the difference between the Fermi levels at the two terminals. (5.1.1) ψg and ψs are the gate work function and the semiconductor …

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