Transcription of Overview of SEMI F47-0706
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Overview of SEMI F47-0706
1 SEMICON Japan 2006 Overview ofSEMI F47-0706 Chuck ThomasSenior EngineerSemiconductor & Industrial PQ ServicesEPRI 942 Corridor Park BlvdKnoxville, TN 37932W:+ : Japan 2006 Why Change semi F47? The original semi F47-0200 (voltage sag immunity) was found to be highly successful in reducing service costs and increasing tool reliability and uptime. Since 2000, Semiconductor Manufacturers, Tool Suppliers and Compliance Testing Companies have amassed a significant technical and practical knowledge base related to testing. This information is beneficial to incorporate in the revised standard. Where Practical, more closely harmonize with new Standards such as IEC 61000 -4-11 and IEC Japan 2006 What Changed?
7 SEMICON® Japan 2006 What Happened to SEMI F42-0600? • SEMI F42-0600 has been superceded by SEMI F47-0706 and IEC 61000-4-34 • The semiconductor tool specific step-by-step approach for tool testing defined in SEMI F42-0600 has been replaced with a more generic test
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