Transcription of Purge System Introduction - 株式会社トリコ
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Purge System Introduction - 株式会社トリコ
TORICO Load Port FOUP. Brillian Purge System Introduction ( . TEL: 044-870-8551. FAX: 044-870-8617. MAIL: . 105-0004. 3-6-6. 03-3503-1711 FAX 03-3503-1755. :14 August 2014. FOUP Loadport with Purge Function Function N2 purging on Carrier Base Adapted FOUP Type: ENTEGRIS A-300, Spectra (4 Purge Port Type) #1. Preventing contamination through Purge port GAS-Filter at INLET Port side #2. Monitor N2 Gas flow rate by flow switch meter (SMC). Optional / Capability Stand alone System (flow rate, RH, Temp., Pressure and data logging). Support RFID_SECS/GEM Solution Support HSMS Communication with MES. Nozzle Purge Plate Computational Fluid Dynamic Simulation ( Purge Efficiency).)
Page 2 . FOUP Loadport with Purge Function • Function – N2 purging on Carrier Base • Adapted FOUP Type: ENTEGRIS A-300, Spectra (4 Purge Port Type) #1
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