Transcription of Purge System Introduction - 株式会社トリコ
1 TORICO Load Port FOUP. Brillian Purge System Introduction ( . TEL: 044-870-8551. FAX: 044-870-8617. MAIL: . 105-0004. 3-6-6. 03-3503-1711 FAX 03-3503-1755. :14 August 2014. FOUP Loadport with Purge Function Function N2 purging on Carrier Base Adapted FOUP Type: ENTEGRIS A-300, Spectra (4 Purge Port Type) #1. Preventing contamination through Purge port GAS-Filter at INLET Port side #2. Monitor N2 Gas flow rate by flow switch meter (SMC). Optional / Capability Stand alone System (flow rate, RH, Temp., Pressure and data logging). Support RFID_SECS/GEM Solution Support HSMS Communication with MES. Nozzle Purge Plate Computational Fluid Dynamic Simulation ( Purge Efficiency).)
2 Confidential Page 2. TORICO Load Port Purge Retrofit Ability Brillian Loadport systematization Main Tool Load Port Spplier Type Lam SEZ. 1 TDK L/P E4A. Wet Etch 2 Lam 2300 Dry Etch TDK L/P E4A. 3 Applied AMAT PVD Sinfonia SELOP12F25-S7A0021. 4 TEL Certas Sinfonia SELOP12F25-60-12. N20. 5 TEL Vigus Hirata KWF-12C-T1. 6 TEL Vigus Cylinder Hirata KWF-12F-M. 7 DNS Sinfonia SELOP12F25-S7D2014. 8 DNS Sinfonia 9 DNS Sinfonia Monitor(Temp.,RH). 1 Lam 2300TM Brooks 2 Frex300x EBARA TDK L/P. N16 3 Lam GXT Brooks KLATENCOR. 4 Sinforia TDK Load Port XCDA(N2) Purge . Embedded type Outlet gas port x2. Inlet gas port x2. Control Module Piping Module Cover extend 100 mm Can Slide out Front View Side View Load Port N2 GUI - Main Load Port Active Status Online/Offline Inlet N2 pressure.
3 Outlet pump pressure. Outlet Humidity/Temp. N2 inlet flow rate High/Low flow rate Solenoid Valve Confidential Facility Requirement 1. Power: AC 110V, 15A. Port . 15A . 2. Gas: XCDA tube: 3/8" , 6 Kg/cm2. ( 5Kg/cm2 . 200L/min;Port ). 3. Exhaust: GEX, 3/8 . ( Port 3/8 ). 4. Communication: Ethernet ( . IP ). 5.. (L/P.)
