修理実績（（（コントロール ... - torico-ltd.co.jp

1 - - VME (CPU BOX)#0100-71054 5% 10W 000-951-030 000-951-030 CHOPPER DRIVER0010-00011 ION TC/AC CONTROLLER0010-00017 PVD DRIVER0010-00079 TRT/OPT CONTROL PWM001009 ASSY SUSCPR CAL DISPLY0010-09063 0010-09063 LAMP MODULE0010-09335 HV MODULE ESC0010-09933 I/O CONTROLLER0010-14217 FDD ( )0010-20095 TREATMENT CONTROLLER0010-20098 DUAL DEGAS DRIVER0010-20331 MATCHING UNIT0010-22161 HV FILTER DPS0010-30139 0010-50169 LAMP DRIVER0010-50169 ANAPHASE CONTROLLER0010-72733 HV FILTER BOX ASSY0010-93076 BOX001-1984 ALINER CONTROLLER001-2980-13 001-4130-03 001-4130-03 ALINER CONTROLLER001-4130-09 001-4130-09 LAMP DRIVER0015-09071 0015-09091 LAMP DRIVER0015-09091

2 LAMP DRIVER0015-09091 LAMP DRIVER0015-09091 LAMP DRIVER0015-09091 LAMP DRIVER0015-09091 LAMP DRIVER0015-09091 LAMP DRIVER0015-09091 SCR POWER CONTROL SPECIALIST0015-09091 SCR POWER CONTROL SPECIALIST0015-09091 0015-09091 001-8736-04 THERMAL ELECTRIC DRVER0020-10525 MOTOR DRIVER0022456-000 ROBOT CONTROLLER002-4037-02 002-4037-04 AC POWER SUPPLY (ASET-F5X)0024636-000 ( BOX)002-9401-01(SP500-24-BA1) EMS POWER SUPPLY( 00473854 CVD Neslab Controller TC 0090-09145 DA 0090-90961 DAQ0090-90966 DAG MKII TYPE H0090-90967 DAQ0090-90967 WAFER ARM SERVO AMP0090-91649 SPGU SINE POWER MOTOR00-S0613-049 VACUUM GAUGE01 01 CHOPPER DRIVE0100-00011 CHOPPER DRIVER0100-00060 PNEUMATIC CONTROL BOARD0100-09008 DISTRIBUTION BOARD0100-09037 TC 0100-092791)

3 - DIO 0100-20003 TC AMP INTERLOCK BOARD DxZ0100-35160 CHOPPER DRIVER BOARD0100-51017 ARC VOLT CONTROL0100-90689 ARC MODULE (CONTROL BOARD)0120-93042 CABLE0140-35603 DC 014610-01 0150-09505 FLUID FLOW SWITCH0150-09607 ULPAFAN016-98 BOX016-98 ION TC CONTROLLER01-81911-00 ION/TC CONTROLLER01-81911-00 UNIT01-81911-00 MATCHING BOX01-82889-001 MICRO WAVE CONTROL MODULE0190-00398 MW 0190-00398 ARX-X491 DEGAS DRIVER(Ultra Uniformity)0190-01496 DEGAS DRIVER (SCR POWER CONTROLLER)0190-01496 DEGAS DRIVER(Ultra Uniformity)

4 0190-01496-005 0190-02703 MICROWAVE CONTROLLER MODULE0190-0398 ARX-X491 LAMP DRIVER0190-09395 0190-09395 HEATER CONTROLLER0190-09419 Heater Driver0190-09419 LAMP DRIVER UNIT0190-09419 HEATER DRIVER0190-09560 DxZ Heater Driver0190-09560 4-PORT UPA0190-15840 SCR DRIVER0190-16541 PC 0190-19050 SCR DRIVER0190-35176 SCR DRIVER0190-35176 TEMPERATURE CONTROL THERMO METER0190-35430 SERIPLEX0190-35765 SERIPLEX SENSOR BUS0190-35791 DIP249 DeviceNet I/O Block0190-36511 DIP294 DEVICE NET I/O BLOCK0190-36511 CHAMBER UNIT0190-36523 SEKIDENKO BOX (3 )0190-36523 SEKIDENKO0190-36524 SEKIDENKO BOX0190-36524 0190-76050 019A/505A MOTOR01DS11 HEATER02-00399-00 02010FM MODULE CONTROLLER (P100)

5 02-034310 2 PLATING02-156284-00 ELECTROFILL02-156284-00 PC02-158999-00 POST PLATE SESIOC02-168110-00 02-257079-00 C ASSY SESIOC1 C3 WTS IMM02-264834-00 HDSICO 300mmMAINFRAME CONTROLLER0242-08588 ANALOG CONTROL03-6000-27001-2 041-030 041-030 04-1520B Multi-Gauge04-714866-01 0500-01083 CPU BOX05001 CONTROLLER05-02008-002 - DC MOTOR0650-00-075 DUAL HEADED GRAPHIC PROCESSOR0660-90060 LOOP CONTROLLER0660-90093 DC MOTOR0661-63-015 ORIENTAL MOTOR07-002 0733 0845-K8845-504 PLC MODULE085574-000 3M/C GRC 086351-501 H_DEGAS DRIVER090-01496 RELAY POWER RPM0913 0950-2578 0950-2578 MOTOR DRIVER0 DHD82 SLEEVE.

6 MAGNETICALLY 1000443 1000443 BEARING1000633 CYLINDER1000640 O-RING1000691 O-RING1000691 (PA4-2645-000) O-Ring1000691 (PA4-2645-000) SOL VALVE1001134 (VALVE, SINGLE, SOLENOID)1001134 (PA4-2526-000) FILTER EXHAUST1001187 AIR CYLINDER1001231 1001247(PA4-2539-000) PROBE RESISTIVITY1001251 SRD1000 DOOR (PA4-2557-000) SEAL DOOR1002480-1 MOTOR DRIVER10026-100 MOTOR 1002789(PA4-2583-000) System Controll Module1003667-06 1003667-3 1003882 1004073 1004073(PA4-2598-000) GASKET PROBE SEAL DRUM MOTOR DRIVER1004P-150A-A02 SYSTEM CONTROLL MODULE1005480 1005480 SYSTEM CONTROL MODULE1005480 1005480(1003667-3)

7 SEAL FLUID FERROFLUIDIC1005884 DRIVER AMP1013064 DUM READOUT101488001 DVM READOUT101488001 BOX102029427 STEPPING MOTOR103-89572-7011 MONITOR ASSY104343002 VIISION104354007 SPINDLE SERVO AMP105-050010-01 RD4500 LID MARK V LID SEAL1058527-1 CABLE CLEANCOIL SUPERCLEAN1160-34 PC TRAY ASSY1065742-605 STATIC ELIMINATOR 100 107 SEAL,STATIC VALVE BRADDER - 1072020-1 ROD,TRACK,DOOR 8100/82001072282-1 NSRD 1075227-711 8200 NSRD CONTROLLER1075227-713 PRESSURE ASSY HALL EFECT MOTOR BEARING,RETAINER PEAK BEARING1077931-1 PEAK BEARING,PEAK WASHER1077931-1, 1079274-1 MOTOR1078209 WASHER.

8 WAVE PEAK WASHER1079274-1 ROD W/F 1081462-5 VIDEO CONVERTER10960 FAN 109R0812G402 1100-0051-00 1100-0051-00 1100-0051-00 MAGNET DRIVER1100-0051-00 MAGNET DRIVER1100-0051-00 1100-0051-00(0190-70060) POWER SUPPLY CIRCURATOR ( )110011200500 AIR MOTOR11002 RUS159AR3 PC POWER SUPPLY (AT )11-0087 VIDEO CONVERTER11071 SETUP CUP CONTROL111376001 PAPER LAIZER UNIT1116601 PROVE CONTROLLER ( )1157450 MOTOR DRIVER PMD-511187-163416-11 Controller1202 120-806369(818S/TC/RLGC/M1V5) 120SW-U SIDE PANEL12-406152-03 1292-AMT SCAN DO PRO II1292-AMT 1303 FDD134-500182-016 FDD (FD1155D)

9 134-500207-808-0 MAXON MOTOR136-454915-01-A01 MOTOR DRIVER1398-DDM-005X-NV SERVO DRIVER1398-DDM-019X 1443-0100 ADVANCED MOTION CONTROLS14486-0005 1-480274-0 1-480277-0 MICROMETER148-123 O/H1600-34 DC24V 1608KL-05W-B40-L00 CONTROLLER161 BOARD ASSY O-TEMP 6CH 400 DEG 30216818-531-0309 RF MATCHING CONTROLLER (1 SET)17-0006-00 170M-6C PROGRAMMMABLE CONTROLLER1785-LT B(96041878) (83-295-002RW)1800 GPIB-ENET181950 CONTROLLER18401-13-ACC70 S WIRE 5 INCH FDD19307275-11 FDD19307673-93 FDD193077C304 LIGHT CHOPPER197 IGBT1DI300Z-120 1 /25W