Vacuum Valve Overhaul - 株式会社トリコ

1 Vacuum Valve OverhaulPressure Control Valve Repair Slit valves Valve Repair Isolation Valve Repair Vacuum Valve OverhaulTEL Unity Gate Valve RepairTEL P/N :3M80-000227-12 Model: UXG846H-KL-04 VAT Pendulum (APC) Valve RepairUse machine : Novellus Vector HomeP/N:04-146459 HomeValve control Open AngleSimulatorHPitittClttOpen position confirmHome Position testCycle test Open position confirmPendulum Valve Components Valve AssemblyBodyMotor AssemblyMotor AssemblyPendulum UnitControl BoardHeaterActuator SealsPendulum PlateIsolation setPendulum Shaft Close setVAT Pendulum Isolation Valve Repair Repair details check : Function and leak test before & Check : Disassembly all of Valve and check each components one by , Replace damaged & all seals and Test : Vacuum leak , Isolation Leak and CDA Leak test : Control simulate verify and cycle test7 Final check packing : heater test and check packing : heater test and packingControl Simulator Leak Test Simulate Control & Cycle test Leak TestLeak Test ByComplete LeakLeak Test By RGA Complete Leak Test Function TestValve operation and functions testV-TEX Rollcam Slit Valve OhlOverhaulSlit ValveSlit Valve VETEX Gate Valve RepairRepair Details :Repair Details : damaged PartsaValve Bellow (Welding l v e Bellow (Welding Bellowor Formed Bellow) all of & Check all TestLoad-lock Slit Valve RepairUse Machine : Novellus Vector , 300mm Description : Gate Valve Assembly , L-Type Novellus P/N : 63-136020-01 valves Overhaul200 cylinder slit ValveVAT Gate Valve O/H200 cylinder slit Va l v eMKS Th ttllMKS Throttle Valve OverhaulSMC Gate Valve O/H 300 Cylinder slit Valve O/HMKS Throttle Valve OverhaulRepair Model :Repair Model :All MKS Type 253 and 683B Throttle ValveModel.)

2 683B-23421 253B-15186 Normal Defect Condition :ASMN ormal Defect Condition :1. Pressure can t servo or servo unstable2. Valve jammed3Vl lt lASM3. Valve lose control4. Valve can t reach initial positionASM E-10 Producer RTPN ovellusProducer SEMKS Throttle Valve OverhaulGear assembly Slip PlateGear damagedSlip Plate damagedSlip Plate DamagedDamagedMotor Gear & Bushing damagedGear Bushing DamagedGear Box DamagedShaft DamagedVacuum Valve RepairMKS ValveMKS ValveNor-Cal ValveIKC ValveSMC ValveMDC ValveIKC ValveSMC ValveMDC ValveValve Overhaul , SCVV alve Assembly, SCV Valve (VEP Va l v e) )Angle type In-Line Type Cylinder assemblyValve Housing assemblyCylinder assembly Valve Housing assembly Valve Overhaul , SCV,CylinderCylinder & Spring Housing Piston Shaft & Bellow ScrewFix ScrewsInternal Heater & T/CShaft & Bellow ScrewFix ScrewsInternal Heater & T/C Valve Overhaul , SCV, Valve Bellow &Va l v e Bellow & Cylinder Seal Internal T/CDisassembly Position Sensor Thermal Switch l Repair Details pReplace Parts.

3 Valve Bellow , Seals , Cylinder Seals , Thermal Switch Repair Parts (Option ) : Internal T/C , Internal Heater, External T/C & Heater, Position Sensor p(p),,, Valve Overhaul , SCVTest :Test : a. Vacuum Leak Testb. Operation TestcPosition Sensor Sensor Testd. T/C Teste. Heater Function TestSMC Isolation Valve Repair SMC Isolation Valve Repair Size form NW16 to ISO160 Repair details : of bellow, Cylinder seal , test cycle 100 Isolation Valve RepairpRepair Details : 1. Cylinder Housingpg2. Valve Valve Housing Repair3. TestPS SMC Valve can be modify to higher Pumping speedPS. SMC Valve can be modify to higher Pumping speedPressure Control Valve RepairUse Machine : Novellus Vector , 300mm Description : Valve , S65, DN100, VAT Novellus P/N : 60-106440-00 SMC Isolation Valve Repair SMC Isolation Valve Repair Size form NW16 to ISO160 Repair details : of bellow, Cylinder seal , test cycle 100 Modify For AMAT Producer Before ModifyOpenCloseResultMKS Valve :1)V lb d1071) Valve body 107mm2)Housing 38mm3)Open , 10 mmMKS Valve (Modified):4) 21% ((10 )x 100%)()1) Valve body 135mm2)Housing 108mm3)Open 40mm3)Open , 40mm4) 84%AftM difAfter ModifyNor-Cal IPV Valve RepairpNor-Cal Isolation Pendulum Valve RiRepair1.

4 Replace all of mechanism partspp2. Replace all of damaged pats3. Function & Leak testNor-Cal IPV Valve RepairpNor-Cal IPV Valve RepairExtra Hard stopfor testFunction and cycle teststopfor test Function and cycle test Leak Test VAT Gate Valve RepairVAT Gate Valve RepairpDN63 ~DN300 VAT valves RepairPressure Control Gate ValveGate ValveSlit Valv