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Scanning Electron Microscope

Scanning Electron Microscope Instructions for Use The reproduction, transmission or use of this document or its contents is not permitted without express written authority. Offenders are liable for damages. All rights reserved. We have checked the contents of this manual for agreement with the hardware and software described. Since deviations cannot be precluded entirely, we cannot guarantee full agreement. 2011 TESCAN, , Brno, Czech Republic Contents 1 MIRA 3 FEG-SEM Contents Contents .. 1 1 Introduction .. 3 2 Safety Information .. 4 3 Installation and Microscope Repairs .. 5 Transport and Storage .. 5 Installation Instructions .. 5 Fuse Replacement .. 5 Instrument Repair and the Spare Parts Usage .. 5 4 Description of the Microscope .. 6 Electron Column .. 6 Electron Column Displaying 9 Electron Column Centering .. 14 Chamber and Sample Stage.

electron source, optical aberrations of the final lens (objective) and the diffraction aberration on the final aperture. The spot size is smaller at shorter working distances. The incident electron beam is cone-shaped. The vertex angle of the cone is determined by the aperture angle. The wider the cone, the lower the depth of focus.

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