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アライメントステージ 超薄形XYθステージ CMX

モータ形式 SGMM-A2C312 SGMAH-01BAA21 SGMAH-02BAA21 定格出力（W） 20 100 200 定格トルク（N・m） 0.0637 0.318 0.637 瞬間最大トルク（N・m） 0.191 0.955 1.91 定格回転速度（min-1） 3000 最高回転速度（min-1） 5000 回転子イナーシャJ（㎏・F） 0.00548 0.0364 0.106 モータ質量（㎏） 0.2 0.5 1.1

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