Chapter 1.10 - Miscellaneous Etchants
For VLSI aluminum etching, there is available a pre-mixed phosphoric/acetic acid mixture. ... Etch rate ~ 2000 Å/min. 16 parts phosphoric acid . 2 parts DI water . 1 part acetic acid . 1 part nitric acid . Aluminum Etchants - Others These will not etch gold, etc. Phosphoric acid at 60ºC ... 1 part conc. HF or 50 g CrO: 3: in 100 ml H: 2: O ...
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