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CHAPTER 10 AUGER ELECTRON SPECTROSCOPY

CHAPTER 10 AUGER ELECTRON SPECTROSCOPY

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X-ray photoelectron spectroscopy (XPS) (Chapter 11), another core-level electron spectroscopy. Auger electron spectroscopy has a depth resolution of 5–25 Å, and can be used, with simultaneous ion sputtering, for depth profiling. With a lateral resolution (< 100 Å) that is significantly better than

  Chapter, Electron, Spectroscopy, Argue, Photoelectron, Ray photoelectron spectroscopy, Chapter 10 auger electron spectroscopy

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