Etch rates for micromachining processing-part II ...
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 12, NO. 6, DECEMBER 2003 761 Etch Rates for Micromachining Processing—Part II Kirt R. Williams, Senior Member, IEEE, Kishan Gupta, Student Member, IEEE, and Matthew Wasilik Abstract—Samples of 53 materials that are used or potentially can be used or in the fabrication of microelectromechanical
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