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MEMS Solutions for Precision Micro-Fluidic Dispensing ...

MEMS Solutions for Precision Micro-Fluidic Dispensing ...

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Pumping Chamber Body Descender Nozzle Silicon and PZT Diaphragm Acoustic Terminator The fill paths are located along the long edges of the die. Ink flows into the device in the plane of the wafer, through a silicon

  Silicon

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