Overview of SEMI F47-0706
7 SEMICON® Japan 2006 What Happened to SEMI F42-0600? • SEMI F42-0600 has been superceded by SEMI F47-0706 and IEC 61000-4-34 • The semiconductor tool specific step-by-step approach for tool testing defined in SEMI F42-0600 has been replaced with a more generic test
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