PRELIMINARY PROGRAM ELEVENTH …

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Cleaning and inspection of EUV reticles: specifications ...

1 Cleaning and inspection of EUV reticles: specifications and prospects Luigi Scaccabarozzi1, Niels A. Lammers2, Roel Moors1, Vadim Banine1 1 ASML Netherlands B.V., De Run 6501, 5504DR, Veldhoven, The Netherlands 2 Technical University Eindhoven, Eindhoven, The Netherlands Corresponding author: Luigi Scaccabarozzi ASML Netherlands B.V.,

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mous errors would result from extrapolation using such results. Similar behavior to Figure 4 is also seen in broadband dielectric measurements on lower molecular weight PI.19

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2 465 Dinwiddie Street • Portsmouth, Virginia 23704 • 1.757.393.1584 Fax: 1.757.393.3708 http://www.firsttenangstroms.com Normal pendant drop used in liquid-vapor surface tension.

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3 Young’s equation When the liquid does not spread, a drop has a contact angle on the surface. The balance between the forces on the surface gives:

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