Transcription of Na ppb <50 +«#ú } >Ô>ù>ü? H 8.207 8.511 8.258 …
1 22 5 ( HI) [ ] [ ] 1) 5) (HI) 57% 127 C [ ]
2 2I24HI+ + HI HB HC ( C) ( C) ( C) (MPa (Air= ) (25 C) (25 C) (25 C) (H O= (-36 C) (-67 C) (10 C) (J/g)155218444 ( /g)1954452,595 J/g)223055 (J/g) (300 C)19 % % % (1000 C)33 % % % 10L 15kg N2ppm< < < Nappb<50 Feppb<50 Nippb<50 Cuppb<50 Crppb<50 Cdppb<50 Pppb<50 Asppb<50 [ ]6) 12) ITO( ) a) b) c) d) e)
3 ITO In2O3 6HI 2 InI3 3H2O SnO2 4HI SnI4 2H2O ITO 1000 / ITO SEM X(X=HI,HBr,HCl,Cl2)/Ar ICP ITO X(X=HI,HBr,HCl,Cl2)/Ar ICO ITO SEM [ ] 1) 2) 3) 4) III 5) 6) ,2000 p117 7) ,2001 p29 8) ,2001 p113 ITO 9) A 123 2 ,2003 HI ITO 10) , p60 11) LCD Intelligence, P113 ITO 12) MEGAX( ) 0501001502002503000102030405060 Bias Power [W]Etch Rate [nm/min.]
4 ] Power Density [W/cm2]HI/ArHBr/ArHCl/ArCl2/Ar
