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AZ nLOF 20xx Negative Resist - MicroChemicals

AZ nLOF 20xx Negative Resist - MicroChemicals

www.microchemicals.com

MicroChemicals GmbH Ulm – www.microchemicals.com - tech@microchemicals.com n Resist Erosion and Development Rate With a sufficient post exposure bake of 110°C for one min-ute, the parameter limiting the extent of cross-linking is the

  Negative, Sisters, Az nlof 20xx negative resist, Nlof, 20xx

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