Search results with tag "Chemical mechanical planarization"

Chemical Mechanical Planarization - bitsonchips

Chemical Mechanical Planarization PT/01/003/JT 2 During the CMP of patterned copper wafers, two phenomena – copper dishing and SiO2 erosion – lead to deviations from the ideal case depicted in …

  Chemical, Mechanical, Chemical mechanical planarization, Planarization