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Edwards XDS10, XDS5, Dry Scroll Vacuum Pump, Users Manual
www.idealvac.comXDS Dry Pump 98/37/EC 94/9/EC 89/336/EEC 73/023/EEC. May 07 Issue J XDS Dry Pump i PAGE i ... XDS5 and XDS10 dry pumps. You must use the XDS pump as specified in this manual. Read this ... The body of the pump includes a fixed scroll and an orbiting scroll. The orbiting scroll is driven by the